Low-temperature growth of highly crystalline (Ba, Sr)TiO3 films by CLCB method

Hochul Rang, Sungho Park, Kyekyoon Kim, Man Young Sung, Hyungsoo Choi

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4 Citations (Scopus)

Abstract

High-quality barium strontium titanate (BST) thin films were fabricated using charged liquid cluster beam (CLCB) method. The X-ray diffraction patterns of the as-deposited BST films indicated that the perovskite phase appeared at 450°C without any intermediate phase and high film crystallinity was achieved at 500°C. The Ba:Sr:Ti ratio in the precursor solution was transferred to the deposited film without any loss. The crystallinity, dielectric constant, dissipation factor, and leakage current density were measured and compared for the as-deposited films prepared at 500°C and the films deposited at 400°C and postannealed at 700°C.

Original languageEnglish
Article number4
JournalElectrochemical and Solid-State Letters
Volume7
Issue number12
DOIs
Publication statusPublished - 2004 Dec 1

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ASJC Scopus subject areas

  • Electrochemistry
  • Materials Science(all)

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