Low-temperature growth of highly crystalline (Ba, Sr)TiO3 films by CLCB method

Hochul Rang, Sungho Park, Kyekyoon Kim, Man Y. Sung, Hyungsoo Choi

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


High-quality barium strontium titanate (BST) thin films were fabricated using charged liquid cluster beam (CLCB) method. The X-ray diffraction patterns of the as-deposited BST films indicated that the perovskite phase appeared at 450°C without any intermediate phase and high film crystallinity was achieved at 500°C. The Ba:Sr:Ti ratio in the precursor solution was transferred to the deposited film without any loss. The crystallinity, dielectric constant, dissipation factor, and leakage current density were measured and compared for the as-deposited films prepared at 500°C and the films deposited at 400°C and postannealed at 700°C.

Original languageEnglish
Article number4
Pages (from-to)F77-F80
JournalElectrochemical and Solid-State Letters
Issue number12
Publication statusPublished - 2004

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering


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