Low-temperature processing of sol-gel-derived lead-zirconate-titanate thin films by oxygen-plasma treatment

Eung Kil Kang, Hyuk Kyoo Jang, Sung Kyun Lee, Eung Ryul Park, Cheol Eui Lee, Kyung Min Kim, Seung Jeong Noh, Seung Jin Yeom

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Ferroelectric thin films of sol-gel-derived Pb(Zrx, Ti1-x)O3 (lead-zirconate-titanate, PZT) were obtained by the low-temperature processing employing oxygen-plasma treatment. The as-coated PZT films were annealed in oxygen ambience at 450 °C, followed by oxygen-plasma treatment at 200 °C, which gave rise to the ferroelectric hysteresis. Annealing of the as-coated PZT films followed by oxygen-plasma teratment at 200 °C gave rise to the ferroelectric hysteresis.

Original languageEnglish
Pages (from-to)407-409
Number of pages3
JournalCurrent Applied Physics
Volume2
Issue number5
DOIs
Publication statusPublished - 2002 Oct

Keywords

  • Low-temperature processing
  • Oxygen-plasma treatment
  • PZT
  • Thin films

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

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