Low-temperature processing of sol-gel-derived lead-zirconate-titanate thin films by oxygen-plasma treatment

Eung Kil Kang, Hyuk Kyoo Jang, Sung Kyun Lee, Eung Ryul Park, Cheol Eui Lee, Kyung Min Kim, Seung Jeong Noh, Seung Jin Yeom

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Ferroelectric thin films of sol-gel-derived Pb(Zr x, Ti 1-x)O 3 (lead-zirconate-titanate, PZT) were obtained by the low-temperature processing employing oxygen-plasma treatment. The as-coated PZT films were annealed in oxygen ambience at 450 °C, followed by oxygen-plasma treatment at 200 °C, which gave rise to the ferroelectric hysteresis. Annealing of the as-coated PZT films followed by oxygen-plasma teratment at 200 °C gave rise to the ferroelectric hysteresis.

Original languageEnglish
Pages (from-to)407-409
Number of pages3
JournalCurrent Applied Physics
Volume2
Issue number5
DOIs
Publication statusPublished - 2002 Oct 1

Fingerprint

oxygen plasma
Sol-gels
Lead
gels
Oxygen
Plasmas
Thin films
thin films
Processing
hysteresis
Ferroelectric materials
ambience
Hysteresis
Ferroelectric thin films
Temperature
annealing
oxygen
Annealing
lead titanate zirconate

Keywords

  • Low-temperature processing
  • Oxygen-plasma treatment
  • PZT
  • Thin films

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Low-temperature processing of sol-gel-derived lead-zirconate-titanate thin films by oxygen-plasma treatment. / Kang, Eung Kil; Jang, Hyuk Kyoo; Lee, Sung Kyun; Park, Eung Ryul; Lee, Cheol Eui; Kim, Kyung Min; Noh, Seung Jeong; Yeom, Seung Jin.

In: Current Applied Physics, Vol. 2, No. 5, 01.10.2002, p. 407-409.

Research output: Contribution to journalArticle

Kang, Eung Kil ; Jang, Hyuk Kyoo ; Lee, Sung Kyun ; Park, Eung Ryul ; Lee, Cheol Eui ; Kim, Kyung Min ; Noh, Seung Jeong ; Yeom, Seung Jin. / Low-temperature processing of sol-gel-derived lead-zirconate-titanate thin films by oxygen-plasma treatment. In: Current Applied Physics. 2002 ; Vol. 2, No. 5. pp. 407-409.
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AU - Noh, Seung Jeong

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