Magnetic, microstructural, and compositional characterization of Fe-N thin films for recording sensor applications

Y. K. Kim, P. B. Narayan

Research output: Contribution to journalArticle

18 Citations (Scopus)


The dependence of microstructural characteristics and magnetic properties on the processing conditions of reactively dc magnetron sputter-deposited Fe-N films (≤1000 A) was investigated for advanced recording sensor applications. The N content of the film increases linearly as the ratio of N2 to Ar flow rate increases. Magnetic properties could be significantly modified by the incorporation of N into the Fe matrix. A N-content range was discovered where desirable soft magnetic properties such as low coercivity and low magnetostriction could be achieved. The soft magnetic properties originated from the amorphous microstructure as evidenced by transmission electron microscopy and x-ray diffraction. The electrical resistivity of Fe-N films with soft magnetic properties was an order of magnitude higher than that of pure Fe or NiFe thin films with comparable thickness.

Original languageEnglish
Pages (from-to)1040-1043
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number3
Publication statusPublished - 1995 May
Externally publishedYes


ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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