Magnetostriction of Sm-Fe and Sm-Fe-B thin films fabricated by RF magnetron sputtering

Sang Ho Lim, Y. S. Choi, S. H. Han, H. J. Kim, T. Shima, H. Fujimori

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

Magnetostriction of amorphous Sm-Fe and Sm-Fe-B thin films is systematically investigated over a wide composition range from 14.1 to 71.7 at% Sm. In the case of Sm-Fe-B thin films, the amount of B is varied from 0.3 to 0.8 at%. Good magnetostrictive characteristics, particularly at low magnetic fields, are achieved in both Sm-Fe and Sm-Fe-B thin films, although better properties are observed in B containing Sm-Fe thin films. At a magnetic field of 100 Oe, for example, the magnitude of magnetostriction is -350 ppm in a Sm-Fe thin film and it is -470 ppm in a B containing Sm-Fe thin film. With their excellent magnetostrictive characteristics, the present Sm-Fe and Sm-Fe-B thin films are considered to be suitable for Si based microdevices.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalJournal of Magnetism and Magnetic Materials
Volume189
Issue number1
Publication statusPublished - 1998 Oct 20
Externally publishedYes

Fingerprint

Magnetostriction
magnetostriction
Magnetron sputtering
magnetron sputtering
Thin films
thin films
Magnetic fields
magnetic fields
Chemical analysis

Keywords

  • Amorphous
  • B addition
  • Magnetostriction - giant
  • Sputtering
  • Thin films - Sm-Fe

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Magnetostriction of Sm-Fe and Sm-Fe-B thin films fabricated by RF magnetron sputtering. / Lim, Sang Ho; Choi, Y. S.; Han, S. H.; Kim, H. J.; Shima, T.; Fujimori, H.

In: Journal of Magnetism and Magnetic Materials, Vol. 189, No. 1, 20.10.1998, p. 1-7.

Research output: Contribution to journalArticle

Lim, Sang Ho ; Choi, Y. S. ; Han, S. H. ; Kim, H. J. ; Shima, T. ; Fujimori, H. / Magnetostriction of Sm-Fe and Sm-Fe-B thin films fabricated by RF magnetron sputtering. In: Journal of Magnetism and Magnetic Materials. 1998 ; Vol. 189, No. 1. pp. 1-7.
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