Magnetostriction of Sm-Fe and Sm-Fe-B thin films fabricated by RF magnetron sputtering

S. H. Lim, Y. S. Choi, S. H. Han, H. J. Kim, T. Shima, H. Fujimori

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)


Magnetostriction of amorphous Sm-Fe and Sm-Fe-B thin films is systematically investigated over a wide composition range from 14.1 to 71.7 at% Sm. In the case of Sm-Fe-B thin films, the amount of B is varied from 0.3 to 0.8 at%. Good magnetostrictive characteristics, particularly at low magnetic fields, are achieved in both Sm-Fe and Sm-Fe-B thin films, although better properties are observed in B containing Sm-Fe thin films. At a magnetic field of 100 Oe, for example, the magnitude of magnetostriction is -350 ppm in a Sm-Fe thin film and it is -470 ppm in a B containing Sm-Fe thin film. With their excellent magnetostrictive characteristics, the present Sm-Fe and Sm-Fe-B thin films are considered to be suitable for Si based microdevices.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalJournal of Magnetism and Magnetic Materials
Issue number1
Publication statusPublished - 1998 Oct 20
Externally publishedYes


  • Amorphous
  • B addition
  • Magnetostriction - giant
  • Sputtering
  • Thin films - Sm-Fe

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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