TY - JOUR
T1 - Magnetostriction of Sm-Fe and Sm-Fe-B thin films fabricated by RF magnetron sputtering
AU - Lim, S. H.
AU - Choi, Y. S.
AU - Han, S. H.
AU - Kim, H. J.
AU - Shima, T.
AU - Fujimori, H.
N1 - Funding Information:
This work was supported by the Ministry of Science and Technology and the Ministry of Industry and Energy in Korea under the Micromachine Technology Development Program.
Copyright:
Copyright 2018 Elsevier B.V., All rights reserved.
PY - 1998/10/20
Y1 - 1998/10/20
N2 - Magnetostriction of amorphous Sm-Fe and Sm-Fe-B thin films is systematically investigated over a wide composition range from 14.1 to 71.7 at% Sm. In the case of Sm-Fe-B thin films, the amount of B is varied from 0.3 to 0.8 at%. Good magnetostrictive characteristics, particularly at low magnetic fields, are achieved in both Sm-Fe and Sm-Fe-B thin films, although better properties are observed in B containing Sm-Fe thin films. At a magnetic field of 100 Oe, for example, the magnitude of magnetostriction is -350 ppm in a Sm-Fe thin film and it is -470 ppm in a B containing Sm-Fe thin film. With their excellent magnetostrictive characteristics, the present Sm-Fe and Sm-Fe-B thin films are considered to be suitable for Si based microdevices.
AB - Magnetostriction of amorphous Sm-Fe and Sm-Fe-B thin films is systematically investigated over a wide composition range from 14.1 to 71.7 at% Sm. In the case of Sm-Fe-B thin films, the amount of B is varied from 0.3 to 0.8 at%. Good magnetostrictive characteristics, particularly at low magnetic fields, are achieved in both Sm-Fe and Sm-Fe-B thin films, although better properties are observed in B containing Sm-Fe thin films. At a magnetic field of 100 Oe, for example, the magnitude of magnetostriction is -350 ppm in a Sm-Fe thin film and it is -470 ppm in a B containing Sm-Fe thin film. With their excellent magnetostrictive characteristics, the present Sm-Fe and Sm-Fe-B thin films are considered to be suitable for Si based microdevices.
KW - Amorphous
KW - B addition
KW - Magnetostriction - giant
KW - Sputtering
KW - Thin films - Sm-Fe
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U2 - 10.1016/S0304-8853(98)00220-0
DO - 10.1016/S0304-8853(98)00220-0
M3 - Article
AN - SCOPUS:0032475759
VL - 189
SP - 1
EP - 7
JO - Journal of Magnetism and Magnetic Materials
JF - Journal of Magnetism and Magnetic Materials
SN - 0304-8853
IS - 1
ER -