X-ray photoelectron spectroscopy (XPS) was employed to investigate the chemical bonding and electronic properties of the interfaces between Pt and [formula omitted] layers that were two-step surface treated using a buffered-oxide etch solution, and hence, to understand the surface-treatment time dependence of the Schottky barrier height (SBH). Current–voltage [formula omitted] measurements show that the effective SBH decreases with increasing surface-treatment time. The XPS results show that as the treatment time increases, the Ga [formula omitted] and Pt [formula omitted] core levels for the 20-min-treated samples shift toward the lower-binding-energy side by 0.6 and 1.5 eV, respectively, compared to the 0.5-min-treated one. It is further shown that the intensity of the oxygen core-level peak decreases with increasing treatment time. Based on the [formula omitted] and XPS results, the observed reduction of the effective SBHs is attributed to the combined effects of the effective removal of the native oxide and the shift of the surface Fermi level toward the valence-band edge.
|Number of pages||3|
|Journal||Journal of Applied Physics|
|Publication status||Published - 2000 Sept 1|
ASJC Scopus subject areas
- Physics and Astronomy(all)