MEM relay for reconfigurable RF circuits

R. E. Mihailovich, M. Kim, J. B. Hacker, E. A. Sovero, J. Studer, J. A. Higgins, J. F. DeNatale

Research output: Contribution to journalArticlepeer-review

164 Citations (Scopus)


We describe a microelectromechanical (MEM) relay technology for high-performance reconfigurable RF circuits. This microrelay, fabricated using surface micromachining, is a metal contact relay with electrical isolation between signal and drive lines. This relay provides excellent switching performance over a broad frequency band (insertion loss of 0.1 dB and isolation of 30 dB at 40 GHz), versatility in switch circuit configurations (microstrip and coplanar, shunt and series), and the capability for monolithic integration with high-frequency electronics. In addition, this MEM relay technology has demonstrated yields and lifetimes that are promising for RF circuit implementation.

Original languageEnglish
Pages (from-to)53-55
Number of pages3
JournalIEEE Microwave and Wireless Components Letters
Issue number2
Publication statusPublished - 2001 Feb


  • Broadband
  • MEM
  • Reconfigurable
  • Relay
  • Reliability

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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