MEMS-based fabrication of multi-walled carbon nanotube pH sensor

Kyong Soo Lee, Jea Hong Kwon, Seung Il Moon, Woo Sung Cho, Yun Hi Lee, Byeong Kwon Ju

Research output: Contribution to journalArticle

Abstract

In this paper, We presents experimental results that demonstrate the pH sensing capability of MW-CNTs. High-density, well-aligned carbon nanotubes, which are MW-CNTs and vertically aligned on a large area of substrate, has been synthesized. The absorption of different range of pH buffer solution in the MW-CNTs changes the conductivity of the MW-CNTs at room temperature. A MEMS-based fabrication process was developed to fabricate a device where MW-CNTs based sensing material was precisely assembled pattern.

Original languageEnglish
Pages (from-to)1367-1370
Number of pages4
JournalKey Engineering Materials
Volume326-328 II
DOIs
Publication statusPublished - 2006

Keywords

  • Carbon nanotube
  • Multi-walled carbon nanotube
  • pH sensor

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'MEMS-based fabrication of multi-walled carbon nanotube pH sensor'. Together they form a unique fingerprint.

  • Cite this