MEMS-based fabrication of multi-walled carbon nanotube pH sensor

Kyong S. Lee, Jea Hong Kwon, Seung I. Moon, Woo Sung Cho, Yun-Hi Lee, Byeong Kwon Ju

Research output: Contribution to journalArticle

Abstract

In this paper, We presents experimental results that demonstrate the pH sensing capability of MW-CNTs. High-density, well-aligned carbon nanotubes, which are MW-CNTs and vertically aligned on a large area of substrate, has been synthesized. The absorption of different range of pH buffer solution in the MW-CNTs changes the conductivity of the MW-CNTs at room temperature. A MEMS-based fabrication process was developed to fabricate a device where MW-CNTs based sensing material was precisely assembled pattern.

Original languageEnglish
Pages (from-to)1367-1370
Number of pages4
JournalKey Engineering Materials
Volume326-328 II
Publication statusPublished - 2006 Dec 6

Fingerprint

pH sensors
Carbon Nanotubes
MEMS
Carbon nanotubes
Buffers
Fabrication
Substrates
Temperature

Keywords

  • Carbon nanotube
  • Multi-walled carbon nanotube
  • pH sensor

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Ceramics and Composites

Cite this

Lee, K. S., Kwon, J. H., Moon, S. I., Cho, W. S., Lee, Y-H., & Ju, B. K. (2006). MEMS-based fabrication of multi-walled carbon nanotube pH sensor. Key Engineering Materials, 326-328 II, 1367-1370.

MEMS-based fabrication of multi-walled carbon nanotube pH sensor. / Lee, Kyong S.; Kwon, Jea Hong; Moon, Seung I.; Cho, Woo Sung; Lee, Yun-Hi; Ju, Byeong Kwon.

In: Key Engineering Materials, Vol. 326-328 II, 06.12.2006, p. 1367-1370.

Research output: Contribution to journalArticle

Lee, KS, Kwon, JH, Moon, SI, Cho, WS, Lee, Y-H & Ju, BK 2006, 'MEMS-based fabrication of multi-walled carbon nanotube pH sensor', Key Engineering Materials, vol. 326-328 II, pp. 1367-1370.
Lee KS, Kwon JH, Moon SI, Cho WS, Lee Y-H, Ju BK. MEMS-based fabrication of multi-walled carbon nanotube pH sensor. Key Engineering Materials. 2006 Dec 6;326-328 II:1367-1370.
Lee, Kyong S. ; Kwon, Jea Hong ; Moon, Seung I. ; Cho, Woo Sung ; Lee, Yun-Hi ; Ju, Byeong Kwon. / MEMS-based fabrication of multi-walled carbon nanotube pH sensor. In: Key Engineering Materials. 2006 ; Vol. 326-328 II. pp. 1367-1370.
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