MEMS-based fabrication of multi-walled carbon nanotube pH sensor

Kyong S. Lee, Jea Hong Kwon, Seung I. Moon, Woo Sung Cho, Yun-Hi Lee, Byeong Kwon Ju

Research output: Contribution to journalArticle


In this paper, We presents experimental results that demonstrate the pH sensing capability of MW-CNTs. High-density, well-aligned carbon nanotubes, which are MW-CNTs and vertically aligned on a large area of substrate, has been synthesized. The absorption of different range of pH buffer solution in the MW-CNTs changes the conductivity of the MW-CNTs at room temperature. A MEMS-based fabrication process was developed to fabricate a device where MW-CNTs based sensing material was precisely assembled pattern.

Original languageEnglish
Pages (from-to)1367-1370
Number of pages4
JournalKey Engineering Materials
Volume326-328 II
Publication statusPublished - 2006 Dec 6



  • Carbon nanotube
  • Multi-walled carbon nanotube
  • pH sensor

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Ceramics and Composites

Cite this

Lee, K. S., Kwon, J. H., Moon, S. I., Cho, W. S., Lee, Y-H., & Ju, B. K. (2006). MEMS-based fabrication of multi-walled carbon nanotube pH sensor. Key Engineering Materials, 326-328 II, 1367-1370.