MEMS-based liquid lens for capsule endoscope

S. W. Seo, S. Han, J. H. Seo, Y. M. Kim, M. S. Kang, N. G. Min, W. B. Choi, Man Young Sung

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

The capsule endoscope, a new application area of digital imaging, is growing rapidly but needs the versatile imaging capabilities such as auto-focusing and zoom-in to be an active diagnostic tool. The liquid lens based on MEMS technology can be a strong candidate because it is able to be small enough. In this paper, a cylinder-type liquid lens was designed based on Young-Lippmann model and then fabricated with MEMS technology combining the silicon thin-film process and the wafer bonding process. The focal length of the lens module including the fabricated liquid lens was changed reproducibly as a function of the applied voltage. With the change of 30V in the applied bias, the focal length of the constructed lens module could be tuned in the range of about 42cm. The fabricated liquid lens was also proven to be small enough to be adopted in the capsule endoscope, which means the liquid lens can be utilized for the imaging capability improvement of the capsule endoscope.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume6931
DOIs
Publication statusPublished - 2008 Jun 17
EventNanosensors and Microsensors for Bio-Systems 2008 - San Diego, CA, United States
Duration: 2008 Mar 112008 Mar 13

Other

OtherNanosensors and Microsensors for Bio-Systems 2008
CountryUnited States
CitySan Diego, CA
Period08/3/1108/3/13

Fingerprint

endoscopes
Endoscopy
capsules
microelectromechanical systems
MEMS
Lenses
lenses
Liquids
liquids
Imaging techniques
modules
Wafer bonding
wafers
Thin films
Silicon
Electric potential
electric potential
silicon
thin films

Keywords

  • Capsule endoscope
  • Electrowetting
  • Liquid lens
  • MEMS
  • Variable focus

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Seo, S. W., Han, S., Seo, J. H., Kim, Y. M., Kang, M. S., Min, N. G., ... Sung, M. Y. (2008). MEMS-based liquid lens for capsule endoscope. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6931). [69310N] https://doi.org/10.1117/12.785856

MEMS-based liquid lens for capsule endoscope. / Seo, S. W.; Han, S.; Seo, J. H.; Kim, Y. M.; Kang, M. S.; Min, N. G.; Choi, W. B.; Sung, Man Young.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6931 2008. 69310N.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Seo, SW, Han, S, Seo, JH, Kim, YM, Kang, MS, Min, NG, Choi, WB & Sung, MY 2008, MEMS-based liquid lens for capsule endoscope. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 6931, 69310N, Nanosensors and Microsensors for Bio-Systems 2008, San Diego, CA, United States, 08/3/11. https://doi.org/10.1117/12.785856
Seo SW, Han S, Seo JH, Kim YM, Kang MS, Min NG et al. MEMS-based liquid lens for capsule endoscope. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6931. 2008. 69310N https://doi.org/10.1117/12.785856
Seo, S. W. ; Han, S. ; Seo, J. H. ; Kim, Y. M. ; Kang, M. S. ; Min, N. G. ; Choi, W. B. ; Sung, Man Young. / MEMS-based liquid lens for capsule endoscope. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6931 2008.
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