MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer

Yoojin Son, Hyunjoo Jenny Lee, Dohee Kim, Yun Kyung Kim, Eui Sung Yoon, Ji Yoon Kang, Nakwon Choi, Tae Geun Kim, Il Joo Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

We present a MEMS neural probe array for multiple-site optical stimulation with low-loss SU-8 optical waveguides. An embedded 20-μm-thick cladding layer was formed by glass reflow process; due to this embedded structure, no additional thickness was required. In addition, optical loss was reduced by using the thick cladding layer and integrating a thick SU-8 layer as a core layer. The low-loss optical waveguide enables multiple-site stimulation with two-step optical splitters. Using the presented probe array, we also demonstrate a successful in-vivo optical stimulation through recording of neural signals from the hippocampus of a transgenic ChR2-YFP mouse. Recorded neural signals were synchronized with light pulses, which confirms that neurons were successfully stimulated by the blue light and the integrated electrode array successfully recorded the neural signals from activated neurons.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages853-856
Number of pages4
ISBN (Print)9781479935086
DOIs
Publication statusPublished - 2014 Jan 1
Externally publishedYes
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 2014 Jan 262014 Jan 30

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period14/1/2614/1/30

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Son, Y., Lee, H. J., Kim, D., Kim, Y. K., Yoon, E. S., Kang, J. Y., Choi, N., Kim, T. G., & Cho, I. J. (2014). MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 853-856). [6765775] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765775