Metal nanoparticle direct inkjet printing for low-temperature 3D micro metal structure fabrication

Seung Hwan Ko, Jaewon Chung, Nico Hotz, Koo Hyun Nam, Costas P. Grigoropoulos

Research output: Contribution to journalArticle

116 Citations (Scopus)

Abstract

Inkjet printing of functional materials is a key technology toward ultra-low-cost, large-area electronics. We demonstrate low-temperature 3D micro metal structure fabrication by direct inkjet printing of metal nanoparticles (NPs) as a versatile, direct 3D metal structuring approach representing an alternative to conventional vacuum deposition and photolithographic methods. Metal NP ink was inkjet-printed to exploit the large melting temperature drop of the nanomaterial and the ease of the NP ink formulation. Parametric studies on the basic conditions for stable 3D inkjet printing of NP ink were carried out. Furthermore, diverse 3D metal microstructures, including micro metal pillar arrays, helices, zigzag and micro bridges were demonstrated and electrical characterization was performed. Since the process requires low temperature, it carries substantial potential for fabrication of electronics on a plastic substrate.

Original languageEnglish
Article number125010
JournalJournal of Micromechanics and Microengineering
Volume20
Issue number12
DOIs
Publication statusPublished - 2010 Dec

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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