Metal-oxide thin-film transistor-based pH sensor with a silver nanowire top gate electrode

Tae Hee Yoo, Byoung In Sang, Byung Yong Wang, Dae-Soon Lim, Hyun Wook Kang, Won Kook Choi, Young Tack Lee, Young Jei Oh, Do Kyung Hwang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Amorphous InGaZnO (IGZO) metal-oxide-semiconductor thin-film transistors (TFTs) are one of the most promising technologies to replace amorphous and polycrystalline Si TFTs. Recently, TFT-based sensing platforms have been gaining significant interests. Here, we report on IGZO transistor-based pH sensors in aqueous medium. In order to achieve stable operation in aqueous environment and enhance sensitivity, we used Al2O3 grown by using atomic layer deposition (ALD) and a porous Ag nanowire (NW) mesh as the top gate dielectric and electrode layers, respectively. Such devices with a Ag NW mesh at the top gate electrode rapidly respond to the pH of solutions by shifting the turn-on voltage. Furthermore, the output voltage signals induced by the voltage shifts can be directly extracted by implantation of a resistive load inverter.

Original languageEnglish
Pages (from-to)901-907
Number of pages7
JournalJournal of the Korean Physical Society
Volume68
Issue number7
DOIs
Publication statusPublished - 2016 Apr 1

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metal oxides
nanowires
transistors
silver
electrodes
sensors
thin films
mesh
electric potential
amorphous semiconductors
atomic layer epitaxy
metal oxide semiconductors
implantation
platforms
output
sensitivity
shift

Keywords

  • Brillouin scattering
  • Dielectric
  • Elastic property
  • PDMS
  • Relaxation process

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Metal-oxide thin-film transistor-based pH sensor with a silver nanowire top gate electrode. / Yoo, Tae Hee; Sang, Byoung In; Wang, Byung Yong; Lim, Dae-Soon; Kang, Hyun Wook; Choi, Won Kook; Lee, Young Tack; Oh, Young Jei; Hwang, Do Kyung.

In: Journal of the Korean Physical Society, Vol. 68, No. 7, 01.04.2016, p. 901-907.

Research output: Contribution to journalArticle

Yoo, TH, Sang, BI, Wang, BY, Lim, D-S, Kang, HW, Choi, WK, Lee, YT, Oh, YJ & Hwang, DK 2016, 'Metal-oxide thin-film transistor-based pH sensor with a silver nanowire top gate electrode', Journal of the Korean Physical Society, vol. 68, no. 7, pp. 901-907. https://doi.org/10.3938/jkps.68.901
Yoo, Tae Hee ; Sang, Byoung In ; Wang, Byung Yong ; Lim, Dae-Soon ; Kang, Hyun Wook ; Choi, Won Kook ; Lee, Young Tack ; Oh, Young Jei ; Hwang, Do Kyung. / Metal-oxide thin-film transistor-based pH sensor with a silver nanowire top gate electrode. In: Journal of the Korean Physical Society. 2016 ; Vol. 68, No. 7. pp. 901-907.
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AU - Kang, Hyun Wook

AU - Choi, Won Kook

AU - Lee, Young Tack

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