Method for forming a fine electrode using polydimethylsiloxane and Fine electrode formed by the same

Kyung Sun (Inventor)

Research output: Patent

Abstract

폴리디메틸실록산을 이용한 미세전극 형성 방법 및 이에의해 형성된 미세전극
Original languageEnglish
Patent number10-0864536
Publication statusPublished - 2008 Oct 14

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