Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules

Hye Jin Kim, Dong Hoon Kang, Eunji Lee, Kyo Seon Hwang, Hyun Joon Shin, Jinsik Kim, Jung ho Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose a simple fluorescent bio-chip based on two types of alternative current-dielectrophoretic (AC-DEP) force, attractive (positive DEP) and repulsive (negative DEP) force, for simultaneous nano-molecules analysis. Various radius of micro-holes on the bio-chip are designed to apply the different AC-DEP forces, and the nano-molecules are concentrated inside the micro-hole arrays according to the intensity of the DEP force. The bio-chip was fabricated by Micro Electro Mechanical system (MEMS) technique, and was composed of two layers; a SiO2 layer and Ta/Pt layer were accomplished for an insulation layer and a top electrode with micro-hole arrays to apply electric fields for DEP force, respectively. Each SiO2 and Ta/Pt layers were deposited by thermal oxidation and sputtering, and micro-hole arrays were fabricated with Inductively Coupled Plasma (ICP) etching process. For generation of each positive and negative DEP at micro-holes, we applied two types of sine-wave AC voltage with different frequency range alternately. The intensity of the DEP force was controlled by the radius of the micro-hole and size of nano-molecule, and calculated with COMSOL multi-physics. Three types of nano-molecules labelled with different fluorescent dye were used and the intensity of nano-molecules was examined by the fluorescent optical analysis after applying the DEP force. By analyzing the fluorescent intensities of the nano-molecules, we verify the various nano-molecules in analyte are located successfully inside corresponding micro-holes with different radius according to their size.

Original languageEnglish
Title of host publicationAdvanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI
EditorsTuan Vo-Dinh, Warren S. Grundfest, Anita Mahadevan-Jansen
PublisherSPIE
Volume10484
ISBN (Electronic)9781510614536
DOIs
Publication statusPublished - 2018 Jan 1
EventAdvanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI 2018 - San Francisco, United States
Duration: 2018 Jan 282018 Jan 30

Other

OtherAdvanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI 2018
CountryUnited States
CitySan Francisco
Period18/1/2818/1/30

Fingerprint

Micro-Electrical-Mechanical Systems
Physics
Electrophoresis
Fluorescent Dyes
alternating current
Electrodes
Hot Temperature
Molecules
sensors
Sensors
molecules
chips
radii
Plasma etching
Inductively coupled plasma
sine waves
plasma etching
Sputtering
Insulation
insulation

Keywords

  • Dielectrophoresis
  • micro-hole array
  • nano-molecules
  • simultaneous analysis

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

Cite this

Kim, H. J., Kang, D. H., Lee, E., Hwang, K. S., Shin, H. J., Kim, J., & Park, J. H. (2018). Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules. In T. Vo-Dinh, W. S. Grundfest, & A. Mahadevan-Jansen (Eds.), Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI (Vol. 10484). [104840I] SPIE. https://doi.org/10.1117/12.2291359

Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules. / Kim, Hye Jin; Kang, Dong Hoon; Lee, Eunji; Hwang, Kyo Seon; Shin, Hyun Joon; Kim, Jinsik; Park, Jung ho.

Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI. ed. / Tuan Vo-Dinh; Warren S. Grundfest; Anita Mahadevan-Jansen. Vol. 10484 SPIE, 2018. 104840I.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, HJ, Kang, DH, Lee, E, Hwang, KS, Shin, HJ, Kim, J & Park, JH 2018, Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules. in T Vo-Dinh, WS Grundfest & A Mahadevan-Jansen (eds), Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI. vol. 10484, 104840I, SPIE, Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI 2018, San Francisco, United States, 18/1/28. https://doi.org/10.1117/12.2291359
Kim HJ, Kang DH, Lee E, Hwang KS, Shin HJ, Kim J et al. Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules. In Vo-Dinh T, Grundfest WS, Mahadevan-Jansen A, editors, Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI. Vol. 10484. SPIE. 2018. 104840I https://doi.org/10.1117/12.2291359
Kim, Hye Jin ; Kang, Dong Hoon ; Lee, Eunji ; Hwang, Kyo Seon ; Shin, Hyun Joon ; Kim, Jinsik ; Park, Jung ho. / Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules. Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI. editor / Tuan Vo-Dinh ; Warren S. Grundfest ; Anita Mahadevan-Jansen. Vol. 10484 SPIE, 2018.
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