Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules

Hye Jin Kim, Dong Hoon Kang, Eunji Lee, Kyo Seon Hwang, Hyun Joon Shin, Jinsik Kim, Jung ho Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose a simple fluorescent bio-chip based on two types of alternative current-dielectrophoretic (AC-DEP) force, attractive (positive DEP) and repulsive (negative DEP) force, for simultaneous nano-molecules analysis. Various radius of micro-holes on the bio-chip are designed to apply the different AC-DEP forces, and the nano-molecules are concentrated inside the micro-hole arrays according to the intensity of the DEP force. The bio-chip was fabricated by Micro Electro Mechanical system (MEMS) technique, and was composed of two layers; a SiO2 layer and Ta/Pt layer were accomplished for an insulation layer and a top electrode with micro-hole arrays to apply electric fields for DEP force, respectively. Each SiO2 and Ta/Pt layers were deposited by thermal oxidation and sputtering, and micro-hole arrays were fabricated with Inductively Coupled Plasma (ICP) etching process. For generation of each positive and negative DEP at micro-holes, we applied two types of sine-wave AC voltage with different frequency range alternately. The intensity of the DEP force was controlled by the radius of the micro-hole and size of nano-molecule, and calculated with COMSOL multi-physics. Three types of nano-molecules labelled with different fluorescent dye were used and the intensity of nano-molecules was examined by the fluorescent optical analysis after applying the DEP force. By analyzing the fluorescent intensities of the nano-molecules, we verify the various nano-molecules in analyte are located successfully inside corresponding micro-holes with different radius according to their size.

Original languageEnglish
Title of host publicationAdvanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI
EditorsTuan Vo-Dinh, Warren S. Grundfest, Anita Mahadevan-Jansen
PublisherSPIE
Volume10484
ISBN (Electronic)9781510614536
DOIs
Publication statusPublished - 2018 Jan 1
EventAdvanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI 2018 - San Francisco, United States
Duration: 2018 Jan 282018 Jan 30

Other

OtherAdvanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI 2018
CountryUnited States
CitySan Francisco
Period18/1/2818/1/30

    Fingerprint

Keywords

  • Dielectrophoresis
  • micro-hole array
  • nano-molecules
  • simultaneous analysis

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

Cite this

Kim, H. J., Kang, D. H., Lee, E., Hwang, K. S., Shin, H. J., Kim, J., & Park, J. H. (2018). Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules. In T. Vo-Dinh, W. S. Grundfest, & A. Mahadevan-Jansen (Eds.), Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI (Vol. 10484). [104840I] SPIE. https://doi.org/10.1117/12.2291359