Micro-optomechanical infrared receiver with optical readout - MIRROR

Paul Norton, M. Mao, T. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, J. Varesi

Research output: Contribution to journalConference article

15 Citations (Scopus)

Abstract

An uncooled infrared detector having an optical readout is described. Infrared heat is sensed with bimaterial cantilevers which bend in response to temperature changes. One side of the bimaterial cantilever is an optical reflector. Visible light reflecting off the bent cantilever is detected with a CCD camera to provide the sensor output. We describe this device as a micro-optomechanical infrared receiver with optical readout - MIRROR. Devices based upon this principle have successfully imaged infrared. Changes to the system are in progress to improve sensitivity.

Original languageEnglish
Pages (from-to)72-78
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4028
Publication statusPublished - 2000
EventInfrared Detectors and Focal Plane Arrays VI - Orlando, FL, USA
Duration: 2000 Apr 252000 Apr 27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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