BaZr 0.85Y 0.15O 3-δ (BZY) thin film was prepared by pulsed laser deposition (PLD) at of 400°C and 700°C and performance was compared as free-standing electrolyte of micro ceramic fuel cells. Structural and electrochemical analyses were conducted using scanning electron microscopy (SEM) and a customized fuel cell measurement set-up, respectively. As a result, we have identified that chemical stability of PLD BZY deposited at 700°C (PLD BZY-700) was improved showing stable open circuit voltage (OCV) close to 0.9V compared to one made at 400°C (PLD BZY-400). Fully densified structure was identified in PLD BZY-700 with clear separation of electrodes.
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