Microelectromechanical-system-based variable-focus liquid lens for capsule endoscopes

Sang Won Seo, Seungoh Han, Jun Ho Seo, Young Mok Kim, Moon Sik Kang, Nam Ki Min, Woo Beom Choi, Man Young Sung

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

A liquid lens based on the electrowetting phenomenon was designed to be cylindrical to minimize dead area. The lens was fabricated with microelectromechanical-system (MEMS) technology using silicon thin film and wafer bonding processes. A multiple dielectric layer comprising Teflon, silicon nitride, and thermal oxide was formed on the cylinder wall. With a change of 11 Vrms in the applied bias, the lens module, including the fabricated liquid lens, showed a focal length change of approximately 166mm. A capsule endoscope was assembled, including the lens module, and was successfully used to take images of a pig colon at various focal lengths.

Original languageEnglish
Pages (from-to)524041-524044
Number of pages4
JournalJapanese journal of applied physics
Volume48
Issue number5
DOIs
Publication statusPublished - 2009 May

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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  • Cite this

    Seo, S. W., Han, S., Seo, J. H., Kim, Y. M., Kang, M. S., Min, N. K., Choi, W. B., & Sung, M. Y. (2009). Microelectromechanical-system-based variable-focus liquid lens for capsule endoscopes. Japanese journal of applied physics, 48(5), 524041-524044. https://doi.org/10.1143/JJAP.48.052404