Microfabirated clark-type sensor for measuing dissolved oxygen

Jungil Park, Jong Hyeon Chang, Myungki Choi, James Jungho Pak, Dong Young Lee, Youngmi Kim Pak

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)


This paper presents a microfabricated Clark-type sensor which exactly can measure dissolved oxygen in the cell containing solution. We designed and fabricated a microfabircated Clark-type sensor for measuring the oxygen respiration level of few cells. The microfabricated Clark-type sensor is composed of 3-electrodes on a glass substrate, a FEP (Fluorinated ethylene propylene) oxygen-permeable membrane, and PDMS (Polydimethylsiloxane) reservoir for storing few cells containing solution. The microfabricated Clark-type sensor was fabricated using MEMS technology. Thin-film Ag/AgCl was employed as a reference electrode and its durability was verified by obtaining a stable open circuit potential versus a commercial Ag/AgCl electrode for 2 hours. Response time, reproducibility and linearity of the fabricated oxygen sensor were examined by amperometry. The fabricated Clark-type sensor showed 40sec of 90% response time, reproducibility with 1.37nA standard deviation of 97.03nA mean in the full-oxygen state and 0.26nA standard deviation of 3.25nA mean in the zero-oxygen state, and an excellent linearity with a correlation coefficient of 0.994.

Original languageEnglish
Title of host publicationThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Number of pages4
Publication statusPublished - 2007
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings of IEEE Sensors


Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Country/TerritoryUnited States
CityAtlanta, GA

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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