Microfabrication and characterization of spray-coated single-wall carbon nanotube film strain gauges

Dongil Lee, Hyun Pyo Hong, Cheol Jin Lee, Chan Won Park, Nam Ki Min

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

We present the design, fabrication, and characterization results of single-wall carbon nanotube (SWCNT) film strain gauges for potential applications as highly sensitive strain, weight, or pressure sensors on the macro-scale. A batch microfabrication process was developed for practical device construction and packaging using spray-coated SWCNTs and a conventional semiconductor process. The prototype was characterized using a commercial metal foil gauge with tensile and compressive testing on a binocular load cell. Our test results demonstrated that the proposed SWCNT film gauges have a linear relationship between resistance changes and externally applied strain. The gauge factor ranged from 7.0 to 16.4 for four different micro-grid configurations, indicating that the maximum strain sensitivity of the prototype was approximately eight times greater than that of commercial gauges.

Original languageEnglish
Article number455301
JournalNanotechnology
Volume22
Issue number45
DOIs
Publication statusPublished - 2011 Nov 11

Fingerprint

Microtechnology
Carbon Nanotubes
Microfabrication
Strain gages
Gages
Carbon nanotubes
Semiconductors
Product Packaging
Metals
Pressure
Weights and Measures
Equipment and Supplies
Binoculars
Pressure sensors
Metal foil
Macros
Packaging
Semiconductor materials
Fabrication
Testing

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Materials Science(all)

Cite this

Microfabrication and characterization of spray-coated single-wall carbon nanotube film strain gauges. / Lee, Dongil; Hong, Hyun Pyo; Lee, Cheol Jin; Park, Chan Won; Min, Nam Ki.

In: Nanotechnology, Vol. 22, No. 45, 455301, 11.11.2011.

Research output: Contribution to journalArticle

Lee, Dongil ; Hong, Hyun Pyo ; Lee, Cheol Jin ; Park, Chan Won ; Min, Nam Ki. / Microfabrication and characterization of spray-coated single-wall carbon nanotube film strain gauges. In: Nanotechnology. 2011 ; Vol. 22, No. 45.
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