Microfluidic devices fabricated by LTCC combined with thick film lithography

Young Joon Yoon, Jaekyung Choi, Jong Woo Lim, Hyo Tae Kim, Jihoon Kim, Youn Suk Choi, Jong Heun Lee, Jong Hee Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based microfluidic devices. To check the applicability of novel process, three types of passive mixers, diffusion-driven T-type mixers with different channel width and convection-driven chaotic mixer, were fabricated and their microfluidic performance was evaluated. It was confirmed that the degree of mixing in ceramic-based microfluidic passive mixers was well matched with the numerical simulation data.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages303-306
Number of pages4
Volume74
DOIs
Publication statusPublished - 2009 Dec 1
Externally publishedYes
EventInternational Conference on Materials for Advanced Technologies, ICMAT 2009 - Singpore, Singapore
Duration: 2009 Jun 282009 Jul 3

Publication series

NameAdvanced Materials Research
Volume74
ISSN (Print)10226680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT 2009
CountrySingapore
CitySingpore
Period09/6/2809/7/3

Fingerprint

Thick films
Microfluidics
Lithography
Photolithography
Temperature
Computer simulation

Keywords

  • Ceramic
  • Lithography
  • LTCC
  • Microfluidic
  • Passive mixer

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yoon, Y. J., Choi, J., Lim, J. W., Kim, H. T., Kim, J., Choi, Y. S., ... Kim, J. H. (2009). Microfluidic devices fabricated by LTCC combined with thick film lithography. In Advanced Materials Research (Vol. 74, pp. 303-306). (Advanced Materials Research; Vol. 74). https://doi.org/10.4028/www.scientific.net/AMR.74.303

Microfluidic devices fabricated by LTCC combined with thick film lithography. / Yoon, Young Joon; Choi, Jaekyung; Lim, Jong Woo; Kim, Hyo Tae; Kim, Jihoon; Choi, Youn Suk; Lee, Jong Heun; Kim, Jong Hee.

Advanced Materials Research. Vol. 74 2009. p. 303-306 (Advanced Materials Research; Vol. 74).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yoon, YJ, Choi, J, Lim, JW, Kim, HT, Kim, J, Choi, YS, Lee, JH & Kim, JH 2009, Microfluidic devices fabricated by LTCC combined with thick film lithography. in Advanced Materials Research. vol. 74, Advanced Materials Research, vol. 74, pp. 303-306, International Conference on Materials for Advanced Technologies, ICMAT 2009, Singpore, Singapore, 09/6/28. https://doi.org/10.4028/www.scientific.net/AMR.74.303
Yoon YJ, Choi J, Lim JW, Kim HT, Kim J, Choi YS et al. Microfluidic devices fabricated by LTCC combined with thick film lithography. In Advanced Materials Research. Vol. 74. 2009. p. 303-306. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.74.303
Yoon, Young Joon ; Choi, Jaekyung ; Lim, Jong Woo ; Kim, Hyo Tae ; Kim, Jihoon ; Choi, Youn Suk ; Lee, Jong Heun ; Kim, Jong Hee. / Microfluidic devices fabricated by LTCC combined with thick film lithography. Advanced Materials Research. Vol. 74 2009. pp. 303-306 (Advanced Materials Research).
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