Microfluidic devices fabricated by LTCC combined with thick film lithography

Young Joon Yoon, Jaekyung Choi, Jong Woo Lim, Hyo Tae Kim, Jihoon Kim, Youn Suk Choi, Jong Heun Lee, Jong Hee Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based microfluidic devices. To check the applicability of novel process, three types of passive mixers, diffusion-driven T-type mixers with different channel width and convection-driven chaotic mixer, were fabricated and their microfluidic performance was evaluated. It was confirmed that the degree of mixing in ceramic-based microfluidic passive mixers was well matched with the numerical simulation data.

Original languageEnglish
Title of host publicationNEMS/MEMS Technology and Devices - Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, ICMAT 2009
Pages303-306
Number of pages4
DOIs
Publication statusPublished - 2009
Externally publishedYes
EventInternational Conference on Materials for Advanced Technologies, ICMAT 2009 - Singpore, Singapore
Duration: 2009 Jun 282009 Jul 3

Publication series

NameAdvanced Materials Research
Volume74
ISSN (Print)1022-6680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT 2009
CountrySingapore
CitySingpore
Period09/6/2809/7/3

Keywords

  • Ceramic
  • LTCC
  • Lithography
  • Microfluidic
  • Passive mixer

ASJC Scopus subject areas

  • Engineering(all)

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