Microhardness of carbon-doped (111) p-type Czochralski silicon

Steven Danyluk, Dae-Soon Lim, Juris Kalejs

Research output: Contribution to journalArticle

15 Citations (Scopus)
Original languageEnglish
Pages (from-to)1135-1137
Number of pages3
JournalJournal of Materials Science Letters
Volume4
Issue number9
DOIs
Publication statusPublished - 1985 Sep 1
Externally publishedYes

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Silicon
Microhardness
Carbon

ASJC Scopus subject areas

  • Materials Science(all)

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Microhardness of carbon-doped (111) p-type Czochralski silicon. / Danyluk, Steven; Lim, Dae-Soon; Kalejs, Juris.

In: Journal of Materials Science Letters, Vol. 4, No. 9, 01.09.1985, p. 1135-1137.

Research output: Contribution to journalArticle

Danyluk, Steven ; Lim, Dae-Soon ; Kalejs, Juris. / Microhardness of carbon-doped (111) p-type Czochralski silicon. In: Journal of Materials Science Letters. 1985 ; Vol. 4, No. 9. pp. 1135-1137.
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