Micromachined catalytic combustible hydrogen gas sensor

Eui Bok Lee, In Sung Hwang, Jung Ho Cha, Ho Jun Lee, Won Bae Lee, James Jungho Pak, Jong Heun Lee, Byeong Kwon Ju

Research output: Contribution to journalArticle

68 Citations (Scopus)

Abstract

An integrated catalytic combustion H2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm2 and the catalytic combustion sensor showed high response to H2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H2 were 0.36 s and 1.29 s, respectively.

Original languageEnglish
Pages (from-to)392-397
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume153
Issue number2
DOIs
Publication statusPublished - 2011 Apr 20

Keywords

  • Catalytic combustion
  • Hydrogen gas sensor
  • MEMS

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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