Micromachined catalytic combustible hydrogen gas sensor

Eui Bok Lee, In Sung Hwang, Jung Ho Cha, Ho Jun Lee, Won Bae Lee, James Jungho Pak, Jong Heun Lee, Byeong Kwon Ju

Research output: Contribution to journalArticle

64 Citations (Scopus)

Abstract

An integrated catalytic combustion H2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm2 and the catalytic combustion sensor showed high response to H2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H2 were 0.36 s and 1.29 s, respectively.

Original languageEnglish
Pages (from-to)392-397
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume153
Issue number2
DOIs
Publication statusPublished - 2011 Apr 20

Fingerprint

Chemical sensors
Hydrogen
sensors
Sensors
hydrogen
chips
gases
heaters
microelectromechanical systems
MEMS
Electric power utilization
recovery
Recovery
Networks (circuits)
Electric potential
electric potential
configurations

Keywords

  • Catalytic combustion
  • Hydrogen gas sensor
  • MEMS

ASJC Scopus subject areas

  • Instrumentation
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Micromachined catalytic combustible hydrogen gas sensor. / Lee, Eui Bok; Hwang, In Sung; Cha, Jung Ho; Lee, Ho Jun; Lee, Won Bae; Pak, James Jungho; Lee, Jong Heun; Ju, Byeong Kwon.

In: Sensors and Actuators, B: Chemical, Vol. 153, No. 2, 20.04.2011, p. 392-397.

Research output: Contribution to journalArticle

Lee, Eui Bok ; Hwang, In Sung ; Cha, Jung Ho ; Lee, Ho Jun ; Lee, Won Bae ; Pak, James Jungho ; Lee, Jong Heun ; Ju, Byeong Kwon. / Micromachined catalytic combustible hydrogen gas sensor. In: Sensors and Actuators, B: Chemical. 2011 ; Vol. 153, No. 2. pp. 392-397.
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