Micromachined ultrasound transducer array for cell stimulation with high spatial resolution

Kyungmin Ko; Jin Hyung Lee; Hyunjoo Jenny Lee; Soo Jin Oh; Ye Eun Chun; Tae Song Kim; Changjoon Lee; Eui Sung Yoon; Kwang Seok Yun; Il Joo Cho

doi:10.1109/MEMSYS.2015.7051041

Micromachined ultrasound transducer array for cell stimulation with high spatial resolution

Kyungmin Ko, Jin Hyung Lee, Hyunjoo Jenny Lee, Soo Jin Oh, Ye Eun Chun, Tae Song Kim, Changjoon Lee, Eui Sung Yoon, Kwang Seok Yun, Il Joo Cho

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

In this work, we present a piezoelectric micromachined ultrasonic transducer (pMUT) array for local stimulation on cultured cells with a high spatial resolution for the first time. We used a bulk piezoelectric film that has a higher piezoelectric coefficient (d<inf>31</inf>) than that of the thin film materials to achieve high acoustic power within a small membrane. The 500-μm-wide and 55-μm-thick transducer membrane exhibits a resonant frequency of 780 kHz, which is within the effective frequency range for stimulating cells. We also demonstrate successful in vitro experiments by stimulating cells using the fabricated pMUT array and verifying the stimulation using fluorescence calcium imaging. Using fluorescence imaging, we observed an increase in Ca<sup>2+</sup> level of TRPA1 expressing HEK293T cells under ultrasound sonication, which confirms that TRPA1 channel in HEK293T cells was activated by ultrasound.

Original language	English
Title of host publication	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	651-654
Number of pages	4
Volume	2015-February
Edition	February
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051041
Publication status	Published - 2015 Feb 26
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

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ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

Cite this

Ko, K., Lee, J. H., Lee, H. J., Oh, S. J., Chun, Y. E., Kim, T. S., ... Cho, I. J. (2015). Micromachined ultrasound transducer array for cell stimulation with high spatial resolution. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (February ed., Vol. 2015-February, pp. 651-654). [7051041] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051041

Micromachined ultrasound transducer array for cell stimulation with high spatial resolution. / Ko, Kyungmin; Lee, Jin Hyung; Lee, Hyunjoo Jenny; Oh, Soo Jin; Chun, Ye Eun; Kim, Tae Song; Lee, Changjoon; Yoon, Eui Sung; Yun, Kwang Seok; Cho, Il Joo.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2015-February February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 651-654 7051041.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ko, K, Lee, JH, Lee, HJ, Oh, SJ, Chun, YE, Kim, TS, Lee, C, Yoon, ES, Yun, KS & Cho, IJ 2015, Micromachined ultrasound transducer array for cell stimulation with high spatial resolution. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). February edn, vol. 2015-February, 7051041, Institute of Electrical and Electronics Engineers Inc., pp. 651-654, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7051041

Ko K, Lee JH, Lee HJ, Oh SJ, Chun YE, Kim TS et al. Micromachined ultrasound transducer array for cell stimulation with high spatial resolution. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). February ed. Vol. 2015-February. Institute of Electrical and Electronics Engineers Inc. 2015. p. 651-654. 7051041 https://doi.org/10.1109/MEMSYS.2015.7051041

Ko, Kyungmin ; Lee, Jin Hyung ; Lee, Hyunjoo Jenny ; Oh, Soo Jin ; Chun, Ye Eun ; Kim, Tae Song ; Lee, Changjoon ; Yoon, Eui Sung ; Yun, Kwang Seok ; Cho, Il Joo. / Micromachined ultrasound transducer array for cell stimulation with high spatial resolution. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2015-February February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 651-654

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abstract = "In this work, we present a piezoelectric micromachined ultrasonic transducer (pMUT) array for local stimulation on cultured cells with a high spatial resolution for the first time. We used a bulk piezoelectric film that has a higher piezoelectric coefficient (d31) than that of the thin film materials to achieve high acoustic power within a small membrane. The 500-μm-wide and 55-μm-thick transducer membrane exhibits a resonant frequency of 780 kHz, which is within the effective frequency range for stimulating cells. We also demonstrate successful in vitro experiments by stimulating cells using the fabricated pMUT array and verifying the stimulation using fluorescence calcium imaging. Using fluorescence imaging, we observed an increase in Ca2+ level of TRPA1 expressing HEK293T cells under ultrasound sonication, which confirms that TRPA1 channel in HEK293T cells was activated by ultrasound.",

author = "Kyungmin Ko and Lee, {Jin Hyung} and Lee, {Hyunjoo Jenny} and Oh, {Soo Jin} and Chun, {Ye Eun} and Kim, {Tae Song} and Changjoon Lee and Yoon, {Eui Sung} and Yun, {Kwang Seok} and Cho, {Il Joo}",

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AU - Ko, Kyungmin

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AU - Lee, Hyunjoo Jenny

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AU - Chun, Ye Eun

AU - Kim, Tae Song

AU - Lee, Changjoon

AU - Yoon, Eui Sung

AU - Yun, Kwang Seok

AU - Cho, Il Joo

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AB - In this work, we present a piezoelectric micromachined ultrasonic transducer (pMUT) array for local stimulation on cultured cells with a high spatial resolution for the first time. We used a bulk piezoelectric film that has a higher piezoelectric coefficient (d31) than that of the thin film materials to achieve high acoustic power within a small membrane. The 500-μm-wide and 55-μm-thick transducer membrane exhibits a resonant frequency of 780 kHz, which is within the effective frequency range for stimulating cells. We also demonstrate successful in vitro experiments by stimulating cells using the fabricated pMUT array and verifying the stimulation using fluorescence calcium imaging. Using fluorescence imaging, we observed an increase in Ca2+ level of TRPA1 expressing HEK293T cells under ultrasound sonication, which confirms that TRPA1 channel in HEK293T cells was activated by ultrasound.

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Access to Document

10.1109/MEMSYS.2015.7051041