Abstract
In this work, we present a piezoelectric micromachined ultrasonic transducer (pMUT) array for local stimulation on cultured cells with a high spatial resolution for the first time. We used a bulk piezoelectric film that has a higher piezoelectric coefficient (d<inf>31</inf>) than that of the thin film materials to achieve high acoustic power within a small membrane. The 500-μm-wide and 55-μm-thick transducer membrane exhibits a resonant frequency of 780 kHz, which is within the effective frequency range for stimulating cells. We also demonstrate successful in vitro experiments by stimulating cells using the fabricated pMUT array and verifying the stimulation using fluorescence calcium imaging. Using fluorescence imaging, we observed an increase in Ca<sup>2+</sup> level of TRPA1 expressing HEK293T cells under ultrasound sonication, which confirms that TRPA1 channel in HEK293T cells was activated by ultrasound.
Original language | English |
---|---|
Title of host publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 651-654 |
Number of pages | 4 |
Volume | 2015-February |
Edition | February |
DOIs | |
Publication status | Published - 2015 Feb 26 |
Externally published | Yes |
Event | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22 |
Other
Other | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 |
---|---|
Country | Portugal |
City | Estoril |
Period | 15/1/18 → 15/1/22 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Condensed Matter Physics
- Electronic, Optical and Magnetic Materials