Micromachined ultrasound transducer array for cell stimulation with high spatial resolution

Kyungmin Ko, Jin Hyung Lee, Hyunjoo Jenny Lee, Soo Jin Oh, Ye Eun Chun, Tae Song Kim, Changjoon Lee, Eui Sung Yoon, Kwang Seok Yun, Il Joo Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this work, we present a piezoelectric micromachined ultrasonic transducer (pMUT) array for local stimulation on cultured cells with a high spatial resolution for the first time. We used a bulk piezoelectric film that has a higher piezoelectric coefficient (d<inf>31</inf>) than that of the thin film materials to achieve high acoustic power within a small membrane. The 500-μm-wide and 55-μm-thick transducer membrane exhibits a resonant frequency of 780 kHz, which is within the effective frequency range for stimulating cells. We also demonstrate successful in vitro experiments by stimulating cells using the fabricated pMUT array and verifying the stimulation using fluorescence calcium imaging. Using fluorescence imaging, we observed an increase in Ca<sup>2+</sup> level of TRPA1 expressing HEK293T cells under ultrasound sonication, which confirms that TRPA1 channel in HEK293T cells was activated by ultrasound.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages651-654
Number of pages4
Volume2015-February
EditionFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Externally publishedYes
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

Other

Other2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
CountryPortugal
CityEstoril
Period15/1/1815/1/22

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Ko, K., Lee, J. H., Lee, H. J., Oh, S. J., Chun, Y. E., Kim, T. S., Lee, C., Yoon, E. S., Yun, K. S., & Cho, I. J. (2015). Micromachined ultrasound transducer array for cell stimulation with high spatial resolution. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (February ed., Vol. 2015-February, pp. 651-654). [7051041] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051041