Microscopic observation of catalytically etched channels and pits in MoS2 flakes

Do Hyun Kim, Jun Hee Choi, Jun Eon Jin, Dong Jin Lee, Gyu-Tae Kim

Research output: Contribution to journalArticle

Abstract

With a growing interest in two-dimensional transition metal dichalcogenide (TMD), etching the structure of TMD for further application is a challenge due to its thermal stability by a high melting point. Here, we report on diverse etched structures in MoS2 flakes based on the catalytic oxidation using a Co catalyst. After impregnated with a Co precursor, MoS2 flakes were oxidized in air by induction heating to obtain an etched structure. As a result, microscopic observation revealed that diverse etched structures in the shape of a channel and a pit were created in the MoS2 flakes. Especially, the catalytic etching by CoO nanoparticles produced two types of channels which have an angle of 120° and 150° respectively. Also, a pit with a depth of approximately 3 nm was found on the oxidized surface of MoS2 flakes. Our results open a new perspective to control the edge site of TMD flakes including S element as well as MoS2 flakes.

Original languageEnglish
Pages (from-to)1053-1058
Number of pages6
JournalApplied Surface Science
Volume467-468
DOIs
Publication statusPublished - 2019 Feb 15

Keywords

  • Catalytic etching
  • Channel
  • Cobalt oxide
  • MoS
  • Oxidation
  • Pit

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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