Microscopic observation of catalytically etched channels and pits in MoS2 flakes

Do Hyun Kim, Jun Hee Choi, Jun Eon Jin, Dong Jin Lee, Gyu-Tae Kim

Research output: Contribution to journalArticle

Abstract

With a growing interest in two-dimensional transition metal dichalcogenide (TMD), etching the structure of TMD for further application is a challenge due to its thermal stability by a high melting point. Here, we report on diverse etched structures in MoS2 flakes based on the catalytic oxidation using a Co catalyst. After impregnated with a Co precursor, MoS2 flakes were oxidized in air by induction heating to obtain an etched structure. As a result, microscopic observation revealed that diverse etched structures in the shape of a channel and a pit were created in the MoS2 flakes. Especially, the catalytic etching by CoO nanoparticles produced two types of channels which have an angle of 120° and 150° respectively. Also, a pit with a depth of approximately 3 nm was found on the oxidized surface of MoS2 flakes. Our results open a new perspective to control the edge site of TMD flakes including S element as well as MoS2 flakes.

Original languageEnglish
Pages (from-to)1053-1058
Number of pages6
JournalApplied Surface Science
Volume467-468
DOIs
Publication statusPublished - 2019 Feb 15

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Transition metals
Etching
Induction heating
Catalytic oxidation
Chemical elements
Melting point
Thermodynamic stability
Nanoparticles
Catalysts
Air

Keywords

  • Catalytic etching
  • Channel
  • Cobalt oxide
  • MoS
  • Oxidation
  • Pit

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Microscopic observation of catalytically etched channels and pits in MoS2 flakes. / Kim, Do Hyun; Choi, Jun Hee; Jin, Jun Eon; Lee, Dong Jin; Kim, Gyu-Tae.

In: Applied Surface Science, Vol. 467-468, 15.02.2019, p. 1053-1058.

Research output: Contribution to journalArticle

Kim, Do Hyun ; Choi, Jun Hee ; Jin, Jun Eon ; Lee, Dong Jin ; Kim, Gyu-Tae. / Microscopic observation of catalytically etched channels and pits in MoS2 flakes. In: Applied Surface Science. 2019 ; Vol. 467-468. pp. 1053-1058.
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