Microtunneling sensors for vacuum level evaluation of field emission display devices

H. W. Park, Byeong Kwon Ju, Y. K. Park, D. J. Lee, Yun-Hi Lee, C. J. Kim, Jung ho Park, M. H. Oh

Research output: Contribution to journalArticle

1 Citation (Scopus)


Lateral type polysilicon field emitters were fabricated and tested in various vacuum levels for the application of a microvacuum sensor. The design and fabrication of the sensor were easy owing to the surface micromachining technique. Field distributions were also characterized by a 3D electromagnetic field simulation tool.

Original languageEnglish
Pages (from-to)542-545
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number2
Publication statusPublished - 2001 Mar 1


ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

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