Microtunneling sensors for vacuum level evaluation of field emission display devices

H. W. Park, B. K. Ju, Y. K. Park, D. J. Lee, Y. H. Lee, C. J. Kim, J. H. Park, M. H. Oh

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Lateral type polysilicon field emitters were fabricated and tested in various vacuum levels for the application of a microvacuum sensor. The design and fabrication of the sensor were easy owing to the surface micromachining technique. Field distributions were also characterized by a 3D electromagnetic field simulation tool.

Original languageEnglish
Pages (from-to)542-545
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume19
Issue number2
DOIs
Publication statusPublished - 2001 Mar

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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