Microtunneling sensors for vacuum level evaluation of field emission display devices

H. W. Park, Byeong Kwon Ju, Y. K. Park, D. J. Lee, Yun-Hi Lee, C. J. Kim, Jung ho Park, M. H. Oh

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Lateral type polysilicon field emitters were fabricated and tested in various vacuum levels for the application of a microvacuum sensor. The design and fabrication of the sensor were easy owing to the surface micromachining technique. Field distributions were also characterized by a 3D electromagnetic field simulation tool.

Original languageEnglish
Pages (from-to)542-545
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume19
Issue number2
DOIs
Publication statusPublished - 2001 Mar 1

Fingerprint

Field emission displays
display devices
field emission
Display devices
Vacuum
Surface micromachining
vacuum
evaluation
sensors
Sensors
micromachining
Polysilicon
Electromagnetic fields
electromagnetic fields
emitters
Fabrication
fabrication
simulation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

Microtunneling sensors for vacuum level evaluation of field emission display devices. / Park, H. W.; Ju, Byeong Kwon; Park, Y. K.; Lee, D. J.; Lee, Yun-Hi; Kim, C. J.; Park, Jung ho; Oh, M. H.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 19, No. 2, 01.03.2001, p. 542-545.

Research output: Contribution to journalArticle

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