Microwave properties and microstructures of (Ba,Sr)TiO3 thin films on various substrates with annealing temperature

Kwang Hwan Cho, Chong-Yun Kang, Seok Jin Yoon, Hyun Jai Kim

Research output: Contribution to journalArticle

Abstract

The dielectric properties of (Ba0.5 Sr0.5)TiO3 ferroelectric thin films have been investigated according to the substrates in order to optimize the their properties. MgO, r-plane sapphire, and poly-crystalline sapphire (Alumina) substrates have been used to deposite (Ba0.5 Sr0.5)TiO3 ferroelectric thin films by RF magnetron sputtering. The BST thin films deposited on the single crystal (100)MgO substrates have high tunability and low dielectric loss. These results are caused by a low misfit between the lattice parameters of the BST films and the substrate. The BST films deposited on r-plane sapphire have relatively high misfit, and the tunability of 17% and dielectric loss of 0.0007. To improve the dielectric properties of the BST films, the post-annealing methods has been introduced. The BST films deposited on (100)MgO, (1102)r-plane sapphire, and poly-crystalline sapphire substrates have best properties in post-annealing conditions of 1050°C, 1100°C, and 1150°C, respectively. The different optimal post-annealing conditions have been found according to the different misfits between the films and substrates, and thermal expansion coefficients. Moreover, the films deposited on alumina substrate which is relatively cheap have a good tunability properties of 23% by the post-annealing.

Original languageEnglish
Pages (from-to)386-389
Number of pages4
JournalKorean Journal of Materials Research
Volume17
Issue number7
Publication statusPublished - 2007 Jul 1

Fingerprint

Aluminum Oxide
Microwaves
Annealing
Sapphire
Thin films
Microstructure
Substrates
Ferroelectric thin films
Temperature
Dielectric losses
Dielectric properties
Alumina
Crystalline materials
Magnetron sputtering
Lattice constants
Thermal expansion
Single crystals

Keywords

  • BST
  • Ferroelectric
  • Microwave tunable devices
  • Thin film

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Microwave properties and microstructures of (Ba,Sr)TiO3 thin films on various substrates with annealing temperature. / Cho, Kwang Hwan; Kang, Chong-Yun; Yoon, Seok Jin; Kim, Hyun Jai.

In: Korean Journal of Materials Research, Vol. 17, No. 7, 01.07.2007, p. 386-389.

Research output: Contribution to journalArticle

Cho, Kwang Hwan ; Kang, Chong-Yun ; Yoon, Seok Jin ; Kim, Hyun Jai. / Microwave properties and microstructures of (Ba,Sr)TiO3 thin films on various substrates with annealing temperature. In: Korean Journal of Materials Research. 2007 ; Vol. 17, No. 7. pp. 386-389.
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