Milli-Hertz Frequency Tuning Architecture Towards High Repeatable Micromachined Axi-Symmetry Gyroscopes

Chong Li, Yuchen Wang, Choon Ki Ahn, Chengxi Zhang, Bo Wang

Research output: Contribution to journalArticlepeer-review

Abstract

Axi-symmetry micro gyroscopes are increasingly popular for its ultra high measurement sensitivity. However, a side effect is the bias repeatability problem. In this paper, we propose and demonstrate an ultra-precise frequency tuning solution to achieve the state-of-the-art repeatability performance. The gyroscope dynamics are firstly analyzed and the major error source is confirmed as the frequency split. Then, an advanced frequency tracker and a precision tuning architecture are developed to improve the bias repeatability. The experimental results prove that the frequency tracker can identify the frequency splits at mHz level. Consequently, a state-of-the-art turn-on to turn-on bias repeatability of 3.6<inline-formula><tex-math notation="LaTeX">$^\circ$</tex-math></inline-formula>/hr is conducted that shows orders of magnitude better than conventional solutions.

Original languageEnglish
Pages (from-to)1-10
Number of pages10
JournalIEEE Transactions on Industrial Electronics
DOIs
Publication statusAccepted/In press - 2022

Keywords

  • Couplings
  • Gyroscopes
  • MEMS gyroscope
  • Phase locked loops
  • Resonant frequency
  • Shock absorbers
  • Tuning
  • Vibrations
  • bias repeatability
  • frequency tuning
  • inertial measurement unit (IMU)
  • inertial sensors

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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