@inproceedings{c15622b77608410098af25e9b4f5cd68,
title = "Minimizing electrostatic charge generation and ESD event in TFT-LCD production equipment",
abstract = "This paper reports the results of investigations into electrostatic charging effects of a separation between glass and stage in TFT LCD manufacturing process. Generated electrostatic charge is closely related with vacuum pressure to hold the glass, holding times, separation cycles, and lift pin up height/speed. Therefore, effects on these factors are studied and a correlation between ESD damage and lift pin materials is analyzed. To avoid ESD damage and to minimize the charge generation during separation process, we suggest that the optimization of process condition and materials are required in addition to grounding and ionization.",
author = "Kim, {Dong Sun} and Lim, {Chun Bae} and Oh, {Du Seok} and Ho, {Won Joon} and Jeong, {Ju Young} and Park, {Byeong Hoo} and Kim, {Tae Young} and Suh, {Kwang S.}",
year = "2012",
language = "English",
isbn = "1585372188",
series = "Electrical Overstress/Electrostatic Discharge Symposium Proceedings",
booktitle = "Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2012, EOS/ESD 2012",
note = "34th International Electrical Overstress/Electrostatic Discharge Symposium, EOS/ESD 2012 ; Conference date: 09-09-2012 Through 14-09-2012",
}