Minimizing electrostatic charge generation and ESD event in TFT-LCD production equipment

Dong Sun Kim, Chun Bae Lim, Du Seok Oh, Won Joon Ho, Ju Young Jeong, Byeong Hoo Park, Tae Young Kim, Kwang S. Suh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper reports the results of investigations into electrostatic charging effects of a separation between glass and stage in TFT LCD manufacturing process. Generated electrostatic charge is closely related with vacuum pressure to hold the glass, holding times, separation cycles, and lift pin up height/speed. Therefore, effects on these factors are studied and a correlation between ESD damage and lift pin materials is analyzed. To avoid ESD damage and to minimize the charge generation during separation process, we suggest that the optimization of process condition and materials are required in addition to grounding and ionization.

Original languageEnglish
Title of host publicationElectrical Overstress/Electrostatic Discharge Symposium Proceedings 2012, EOS/ESD 2012
Publication statusPublished - 2012
Event34th International Electrical Overstress/Electrostatic Discharge Symposium, EOS/ESD 2012 - Tucson, AZ, United States
Duration: 2012 Sep 92012 Sep 14

Publication series

NameElectrical Overstress/Electrostatic Discharge Symposium Proceedings
ISSN (Print)0739-5159

Other

Other34th International Electrical Overstress/Electrostatic Discharge Symposium, EOS/ESD 2012
CountryUnited States
CityTucson, AZ
Period12/9/912/9/14

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Kim, D. S., Lim, C. B., Oh, D. S., Ho, W. J., Jeong, J. Y., Park, B. H., Kim, T. Y., & Suh, K. S. (2012). Minimizing electrostatic charge generation and ESD event in TFT-LCD production equipment. In Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2012, EOS/ESD 2012 [6333291] (Electrical Overstress/Electrostatic Discharge Symposium Proceedings).