Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers

Byoung Suhk Kim, Dong Jun Lee, Sung Kyu Min, Young Jun Kim, Soo Hyun Kim, Do Yeung Yoon, Hee Woo Rhee

Research output: Contribution to journalArticle

Abstract

Star-shaped polycaprolactones (PCL) with 4- or 5-arms were synthesized to be used as a porogen for nanoporous dielectric materials. Methylsilsesquioxane (MSSQ) was used as an inorganic matrix. Miscibility with MSSQ strongly depended on the molecular weight of the porogens used. Dielectric constants of the nanoporous thin films were measured using MIS cell configuration.

Original languageEnglish
Pages (from-to)301-304
Number of pages4
JournalMolecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals
Volume370
Publication statusPublished - 2001 Dec 1
Externally publishedYes

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Keywords

  • Dielectric constant
  • Methylsilsesquioxane (MSSQ)
  • Miscibility
  • Nanoporosity
  • Porogen
  • Thin film

ASJC Scopus subject areas

  • Condensed Matter Physics

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