Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers

Byoung Suhk Kim; Dong Jun Lee; Sung Kyu Min; Young Jun Kim; Soo Hyun Kim; Do Yeung Yoon; Hee Woo Rhee

doi:10.1080/10587250108030093

Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers

Byoung Suhk Kim, Dong Jun Lee, Sung Kyu Min, Young Jun Kim, Soo Hyun Kim, Do Yeung Yoon, Hee Woo Rhee

KU-KIST Graduate School of Converging Science and Technology

Research output: Contribution to journal › Article › peer-review

Abstract

Star-shaped polycaprolactones (PCL) with 4- or 5-arms were synthesized to be used as a porogen for nanoporous dielectric materials. Methylsilsesquioxane (MSSQ) was used as an inorganic matrix. Miscibility with MSSQ strongly depended on the molecular weight of the porogens used. Dielectric constants of the nanoporous thin films were measured using MIS cell configuration.

Original language	English
Pages (from-to)	301-304
Number of pages	4
Journal	Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals
Volume	370
DOIs	https://doi.org/10.1080/10587250108030093
Publication status	Published - 2001

Keywords

Dielectric constant
Methylsilsesquioxane (MSSQ)
Miscibility
Nanoporosity
Porogen
Thin film

ASJC Scopus subject areas

Condensed Matter Physics

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10.1080/10587250108030093

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Kim, B. S., Lee, D. J., Min, S. K., Kim, Y. J., Kim, S. H., Yoon, D. Y., & Rhee, H. W. (2001). Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers. Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals, 370, 301-304. https://doi.org/10.1080/10587250108030093

Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers. / Kim, Byoung Suhk; Lee, Dong Jun; Min, Sung Kyu et al.

In: Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals, Vol. 370, 2001, p. 301-304.

Research output: Contribution to journal › Article › peer-review

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title = "Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers",

abstract = "Star-shaped polycaprolactones (PCL) with 4- or 5-arms were synthesized to be used as a porogen for nanoporous dielectric materials. Methylsilsesquioxane (MSSQ) was used as an inorganic matrix. Miscibility with MSSQ strongly depended on the molecular weight of the porogens used. Dielectric constants of the nanoporous thin films were measured using MIS cell configuration.",

keywords = "Dielectric constant, Methylsilsesquioxane (MSSQ), Miscibility, Nanoporosity, Porogen, Thin film",

author = "Kim, {Byoung Suhk} and Lee, {Dong Jun} and Min, {Sung Kyu} and Kim, {Young Jun} and Kim, {Soo Hyun} and Yoon, {Do Yeung} and Rhee, {Hee Woo}",

note = "Funding Information: Ihis work was supported in part by the Korean Collaborative Project for Excellence in Basic System IC Technology (98-B4-CO-OO-O1-00-02).",

year = "2001",

doi = "10.1080/10587250108030093",

language = "English",

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T1 - Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers

AU - Kim, Byoung Suhk

AU - Lee, Dong Jun

AU - Min, Sung Kyu

AU - Kim, Young Jun

AU - Kim, Soo Hyun

AU - Yoon, Do Yeung

AU - Rhee, Hee Woo

N1 - Funding Information: Ihis work was supported in part by the Korean Collaborative Project for Excellence in Basic System IC Technology (98-B4-CO-OO-O1-00-02).

PY - 2001

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N2 - Star-shaped polycaprolactones (PCL) with 4- or 5-arms were synthesized to be used as a porogen for nanoporous dielectric materials. Methylsilsesquioxane (MSSQ) was used as an inorganic matrix. Miscibility with MSSQ strongly depended on the molecular weight of the porogens used. Dielectric constants of the nanoporous thin films were measured using MIS cell configuration.

AB - Star-shaped polycaprolactones (PCL) with 4- or 5-arms were synthesized to be used as a porogen for nanoporous dielectric materials. Methylsilsesquioxane (MSSQ) was used as an inorganic matrix. Miscibility with MSSQ strongly depended on the molecular weight of the porogens used. Dielectric constants of the nanoporous thin films were measured using MIS cell configuration.

KW - Dielectric constant

KW - Methylsilsesquioxane (MSSQ)

KW - Miscibility

KW - Nanoporosity

KW - Porogen

KW - Thin film

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DO - 10.1080/10587250108030093

M3 - Article

AN - SCOPUS:31944445997

SN - 1542-1406

VL - 370

SP - 301

EP - 304

JO - Molecular Crystals and Liquid Crystals

JF - Molecular Crystals and Liquid Crystals

ER -

Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers

Abstract

Keywords

ASJC Scopus subject areas

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