Model-based double dipole lithography for sub-30nm node device

A. Young Je, Soo Han Choi, Jeong Hoon Lee, Ji Young Lee, James Word, Chul Hong Park, Sang Hoon Lee, Moon Hyun Yoo, Gyu Tae Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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