Modification of the optical properties of ZnO thin films by proton implantation

Yong Ju Ham, Jun Kue Park, W. Lee, Cheol Eui Lee, W. Park

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Optical properties of proton-implanted ZnO thin film prepared by radio-frequency (rf) magneton sputtering have been studied, the optical constants being obtained from the reflectance measurements by employing Cauchy-Urbach model. Increase in the ordinary refractive index after proton implantation was explained by that in the polarizability. Besides, a slight increase in the optical band gap by proton implantation was identified and discussed in terms of the hydrogen shallow donors introduced by the proton implantation.

Original languageEnglish
Pages (from-to)2403-2406
Number of pages4
JournalMaterials Research Bulletin
Volume47
Issue number9
DOIs
Publication statusPublished - 2012 Sep

Keywords

  • A. ZnO film
  • B. Proton implantation
  • D. Optical properties

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Modification of the optical properties of ZnO thin films by proton implantation'. Together they form a unique fingerprint.

  • Cite this