Multi-height micro structures in poly(dimethyl siloxane) lab-on-a-chip

Seok Chung, J. Park, C. Chung, D. C. Han, J. K. Chang

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The PDMS (poly(dimethyl siloxane)) replica molding is very useful for lab-on-a-chip development. This paper describes the several fabrication schemes of master fabrication for multi-height micro structures in PDMS microchip, and gives the overview over the technologies used for PDMS replica molding and channel closing with oxygen plasma treatment. Developed processes in the paper are good solution to fabricate the more complex structures in microfluidic lab-on-a-chip.

Original languageEnglish
Pages (from-to)81-88
Number of pages8
JournalMicrosystem Technologies
Volume10
Issue number2
DOIs
Publication statusPublished - 2004 Jan 1
Externally publishedYes

Fingerprint

Siloxanes
Lab-on-a-chip
siloxanes
replicas
Molding
chips
Fabrication
microstructure
Microstructure
fabrication
oxygen plasma
closing
Microfluidics
Oxygen
Plasmas

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

Multi-height micro structures in poly(dimethyl siloxane) lab-on-a-chip. / Chung, Seok; Park, J.; Chung, C.; Han, D. C.; Chang, J. K.

In: Microsystem Technologies, Vol. 10, No. 2, 01.01.2004, p. 81-88.

Research output: Contribution to journalArticle

Chung, Seok ; Park, J. ; Chung, C. ; Han, D. C. ; Chang, J. K. / Multi-height micro structures in poly(dimethyl siloxane) lab-on-a-chip. In: Microsystem Technologies. 2004 ; Vol. 10, No. 2. pp. 81-88.
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