Multilayer piezoelectric haptic actuator with CuO-modified PZT-PZNN ceramics

In Tae Seo; Tae Gon Lee; Dae Hyeon Kim; Joon Hur; Jong Hyun Kim; Sahn Nahm; Jungho Ryu; Byung Yul Choi

doi:10.1016/j.sna.2015.12.012

Multilayer piezoelectric haptic actuator with CuO-modified PZT-PZNN ceramics

In Tae Seo, Tae Gon Lee, Dae Hyeon Kim, Joon Hur, Jong Hyun Kim, Sahn Nahm, Jungho Ryu, Byung Yul Choi

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

A piezoelectric haptic actuator composed of a multilayered ceramic (MLC) of 0.5 mol% CuO-modified 0.69Pb(Zr_0.47Ti_0.53)O₃-0.31[Pb(Zn_0.4Ni_0.6)_1/3Nb_2/3]O₃ (0.5CPZT-PZNN) ceramic was developed and characterized. The 0.5CPZT-PZNN ceramic was well-sintered at 900 °C. This ceramic showed a small ε^T₃₃/ε_o of 1801 and a large d₃₃ of 570 pC/N, necessary characteristics for high-performance actuators operating at low voltages. This ceramic also showed a high field-induced strain, maintained after 10⁶ fatigue cycles. A three-layer MLC was synthesized at 900 °C using this ceramic. Ag metal was used as the electrode for the MLC actuator. No inter diffusion between the Ag electrode and the 0.5CPZT-PZNN ceramic layer was observed. The MLC actuator exhibited a high free stroke of ± 300 μm even after 10⁶ bending cycles. The piezoelectric haptic actuator fabricated using this MLC showed a large vibration acceleration of 2.1 G with a low capacitance of 20 nF. This demonstrates the suitability of the 0.5CPZT-PZNN ceramic for applications in piezoelectric haptic actuator.

Original language	English
Pages (from-to)	71-79
Number of pages	9
Journal	Sensors and Actuators, A: Physical
Volume	238
DOIs	https://doi.org/10.1016/j.sna.2015.12.012
Publication status	Published - 2016 Feb 1

Keywords

Actuator
Haptic
Multi-layer
PZT-based ceramics
Piezoelectric

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2015.12.012

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@article{60d27d50cf9d49689c8833b9afb98853,

title = "Multilayer piezoelectric haptic actuator with CuO-modified PZT-PZNN ceramics",

abstract = "A piezoelectric haptic actuator composed of a multilayered ceramic (MLC) of 0.5 mol% CuO-modified 0.69Pb(Zr0.47Ti0.53)O3-0.31[Pb(Zn0.4Ni0.6)1/3Nb2/3]O3 (0.5CPZT-PZNN) ceramic was developed and characterized. The 0.5CPZT-PZNN ceramic was well-sintered at 900 °C. This ceramic showed a small εT33/εo of 1801 and a large d33 of 570 pC/N, necessary characteristics for high-performance actuators operating at low voltages. This ceramic also showed a high field-induced strain, maintained after 106 fatigue cycles. A three-layer MLC was synthesized at 900 °C using this ceramic. Ag metal was used as the electrode for the MLC actuator. No inter diffusion between the Ag electrode and the 0.5CPZT-PZNN ceramic layer was observed. The MLC actuator exhibited a high free stroke of ± 300 μm even after 106 bending cycles. The piezoelectric haptic actuator fabricated using this MLC showed a large vibration acceleration of 2.1 G with a low capacitance of 20 nF. This demonstrates the suitability of the 0.5CPZT-PZNN ceramic for applications in piezoelectric haptic actuator.",

keywords = "Actuator, Haptic, Multi-layer, PZT-based ceramics, Piezoelectric",

author = "Seo, {In Tae} and Lee, {Tae Gon} and Kim, {Dae Hyeon} and Joon Hur and Kim, {Jong Hyun} and Sahn Nahm and Jungho Ryu and Choi, {Byung Yul}",

note = "Funding Information: This work was supported by the Industrial Strategic Technology Development Program, 10041232, “Development of synthesis method of exfoliated inorganic nanosheets with a high dielectric constant of >400 and the corresponding thin films applicable for the fabrication of high performance MLCC” funded by the Ministry of Knowledge Economy (MKE, Korea). Publisher Copyright: {\textcopyright} 2015 Elsevier B.V. All rights reserved. Copyright: Copyright 2015 Elsevier B.V., All rights reserved.",

year = "2016",

month = feb,

day = "1",

doi = "10.1016/j.sna.2015.12.012",

language = "English",

volume = "238",

pages = "71--79",

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T1 - Multilayer piezoelectric haptic actuator with CuO-modified PZT-PZNN ceramics

AU - Seo, In Tae

AU - Lee, Tae Gon

AU - Kim, Dae Hyeon

AU - Hur, Joon

AU - Kim, Jong Hyun

AU - Nahm, Sahn

AU - Ryu, Jungho

AU - Choi, Byung Yul

N1 - Funding Information: This work was supported by the Industrial Strategic Technology Development Program, 10041232, “Development of synthesis method of exfoliated inorganic nanosheets with a high dielectric constant of >400 and the corresponding thin films applicable for the fabrication of high performance MLCC” funded by the Ministry of Knowledge Economy (MKE, Korea). Publisher Copyright: © 2015 Elsevier B.V. All rights reserved. Copyright: Copyright 2015 Elsevier B.V., All rights reserved.

PY - 2016/2/1

Y1 - 2016/2/1

N2 - A piezoelectric haptic actuator composed of a multilayered ceramic (MLC) of 0.5 mol% CuO-modified 0.69Pb(Zr0.47Ti0.53)O3-0.31[Pb(Zn0.4Ni0.6)1/3Nb2/3]O3 (0.5CPZT-PZNN) ceramic was developed and characterized. The 0.5CPZT-PZNN ceramic was well-sintered at 900 °C. This ceramic showed a small εT33/εo of 1801 and a large d33 of 570 pC/N, necessary characteristics for high-performance actuators operating at low voltages. This ceramic also showed a high field-induced strain, maintained after 106 fatigue cycles. A three-layer MLC was synthesized at 900 °C using this ceramic. Ag metal was used as the electrode for the MLC actuator. No inter diffusion between the Ag electrode and the 0.5CPZT-PZNN ceramic layer was observed. The MLC actuator exhibited a high free stroke of ± 300 μm even after 106 bending cycles. The piezoelectric haptic actuator fabricated using this MLC showed a large vibration acceleration of 2.1 G with a low capacitance of 20 nF. This demonstrates the suitability of the 0.5CPZT-PZNN ceramic for applications in piezoelectric haptic actuator.

AB - A piezoelectric haptic actuator composed of a multilayered ceramic (MLC) of 0.5 mol% CuO-modified 0.69Pb(Zr0.47Ti0.53)O3-0.31[Pb(Zn0.4Ni0.6)1/3Nb2/3]O3 (0.5CPZT-PZNN) ceramic was developed and characterized. The 0.5CPZT-PZNN ceramic was well-sintered at 900 °C. This ceramic showed a small εT33/εo of 1801 and a large d33 of 570 pC/N, necessary characteristics for high-performance actuators operating at low voltages. This ceramic also showed a high field-induced strain, maintained after 106 fatigue cycles. A three-layer MLC was synthesized at 900 °C using this ceramic. Ag metal was used as the electrode for the MLC actuator. No inter diffusion between the Ag electrode and the 0.5CPZT-PZNN ceramic layer was observed. The MLC actuator exhibited a high free stroke of ± 300 μm even after 106 bending cycles. The piezoelectric haptic actuator fabricated using this MLC showed a large vibration acceleration of 2.1 G with a low capacitance of 20 nF. This demonstrates the suitability of the 0.5CPZT-PZNN ceramic for applications in piezoelectric haptic actuator.

KW - Actuator

KW - Haptic

KW - Multi-layer

KW - PZT-based ceramics

KW - Piezoelectric

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M3 - Article

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VL - 238

SP - 71

EP - 79

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

ER -

Multilayer piezoelectric haptic actuator with CuO-modified PZT-PZNN ceramics

Abstract

Keywords

ASJC Scopus subject areas

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