Multilayer piezoelectric haptic actuator with CuO-modified PZT-PZNN ceramics

In Tae Seo, Tae Gon Lee, Dae Hyeon Kim, Joon Hur, Jong Hyun Kim, Sahn Nahm, Jungho Ryu, Byung Yul Choi

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)


A piezoelectric haptic actuator composed of a multilayered ceramic (MLC) of 0.5 mol% CuO-modified 0.69Pb(Zr0.47Ti0.53)O3-0.31[Pb(Zn0.4Ni0.6)1/3Nb2/3]O3 (0.5CPZT-PZNN) ceramic was developed and characterized. The 0.5CPZT-PZNN ceramic was well-sintered at 900 °C. This ceramic showed a small εT33o of 1801 and a large d33 of 570 pC/N, necessary characteristics for high-performance actuators operating at low voltages. This ceramic also showed a high field-induced strain, maintained after 106 fatigue cycles. A three-layer MLC was synthesized at 900 °C using this ceramic. Ag metal was used as the electrode for the MLC actuator. No inter diffusion between the Ag electrode and the 0.5CPZT-PZNN ceramic layer was observed. The MLC actuator exhibited a high free stroke of ± 300 μm even after 106 bending cycles. The piezoelectric haptic actuator fabricated using this MLC showed a large vibration acceleration of 2.1 G with a low capacitance of 20 nF. This demonstrates the suitability of the 0.5CPZT-PZNN ceramic for applications in piezoelectric haptic actuator.

Original languageEnglish
Pages (from-to)71-79
Number of pages9
JournalSensors and Actuators, A: Physical
Publication statusPublished - 2016 Feb 1


  • Actuator
  • Haptic
  • Multi-layer
  • PZT-based ceramics
  • Piezoelectric

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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