Abstract
A piezoelectric haptic actuator composed of a multilayered ceramic (MLC) of 0.5 mol% CuO-modified 0.69Pb(Zr0.47Ti0.53)O3-0.31[Pb(Zn0.4Ni0.6)1/3Nb2/3]O3 (0.5CPZT-PZNN) ceramic was developed and characterized. The 0.5CPZT-PZNN ceramic was well-sintered at 900 °C. This ceramic showed a small εT 33/εo of 1801 and a large d33 of 570 pC/N, necessary characteristics for high-performance actuators operating at low voltages. This ceramic also showed a high field-induced strain, maintained after 106 fatigue cycles. A three-layer MLC was synthesized at 900 °C using this ceramic. Ag metal was used as the electrode for the MLC actuator. No inter diffusion between the Ag electrode and the 0.5CPZT-PZNN ceramic layer was observed. The MLC actuator exhibited a high free stroke of ± 300 μm even after 106 bending cycles. The piezoelectric haptic actuator fabricated using this MLC showed a large vibration acceleration of 2.1 G with a low capacitance of 20 nF. This demonstrates the suitability of the 0.5CPZT-PZNN ceramic for applications in piezoelectric haptic actuator.
| Original language | English |
|---|---|
| Pages (from-to) | 71-79 |
| Number of pages | 9 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 238 |
| DOIs | |
| Publication status | Published - 2016 Feb 1 |
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Keywords
- Actuator
- Haptic
- Multi-layer
- Piezoelectric
- PZT-based ceramics
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
- Electronic, Optical and Magnetic Materials
- Metals and Alloys
- Surfaces, Coatings and Films
- Instrumentation
Cite this
Multilayer piezoelectric haptic actuator with CuO-modified PZT-PZNN ceramics. / Seo, In Tae; Lee, Tae Gon; Kim, Dae Hyeon; Hur, Joon; Kim, Jong Hyun; Nahm, Sahn; Ryu, Jungho; Choi, Byung Yul.
In: Sensors and Actuators, A: Physical, Vol. 238, 01.02.2016, p. 71-79.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Multilayer piezoelectric haptic actuator with CuO-modified PZT-PZNN ceramics
AU - Seo, In Tae
AU - Lee, Tae Gon
AU - Kim, Dae Hyeon
AU - Hur, Joon
AU - Kim, Jong Hyun
AU - Nahm, Sahn
AU - Ryu, Jungho
AU - Choi, Byung Yul
PY - 2016/2/1
Y1 - 2016/2/1
N2 - A piezoelectric haptic actuator composed of a multilayered ceramic (MLC) of 0.5 mol% CuO-modified 0.69Pb(Zr0.47Ti0.53)O3-0.31[Pb(Zn0.4Ni0.6)1/3Nb2/3]O3 (0.5CPZT-PZNN) ceramic was developed and characterized. The 0.5CPZT-PZNN ceramic was well-sintered at 900 °C. This ceramic showed a small εT 33/εo of 1801 and a large d33 of 570 pC/N, necessary characteristics for high-performance actuators operating at low voltages. This ceramic also showed a high field-induced strain, maintained after 106 fatigue cycles. A three-layer MLC was synthesized at 900 °C using this ceramic. Ag metal was used as the electrode for the MLC actuator. No inter diffusion between the Ag electrode and the 0.5CPZT-PZNN ceramic layer was observed. The MLC actuator exhibited a high free stroke of ± 300 μm even after 106 bending cycles. The piezoelectric haptic actuator fabricated using this MLC showed a large vibration acceleration of 2.1 G with a low capacitance of 20 nF. This demonstrates the suitability of the 0.5CPZT-PZNN ceramic for applications in piezoelectric haptic actuator.
AB - A piezoelectric haptic actuator composed of a multilayered ceramic (MLC) of 0.5 mol% CuO-modified 0.69Pb(Zr0.47Ti0.53)O3-0.31[Pb(Zn0.4Ni0.6)1/3Nb2/3]O3 (0.5CPZT-PZNN) ceramic was developed and characterized. The 0.5CPZT-PZNN ceramic was well-sintered at 900 °C. This ceramic showed a small εT 33/εo of 1801 and a large d33 of 570 pC/N, necessary characteristics for high-performance actuators operating at low voltages. This ceramic also showed a high field-induced strain, maintained after 106 fatigue cycles. A three-layer MLC was synthesized at 900 °C using this ceramic. Ag metal was used as the electrode for the MLC actuator. No inter diffusion between the Ag electrode and the 0.5CPZT-PZNN ceramic layer was observed. The MLC actuator exhibited a high free stroke of ± 300 μm even after 106 bending cycles. The piezoelectric haptic actuator fabricated using this MLC showed a large vibration acceleration of 2.1 G with a low capacitance of 20 nF. This demonstrates the suitability of the 0.5CPZT-PZNN ceramic for applications in piezoelectric haptic actuator.
KW - Actuator
KW - Haptic
KW - Multi-layer
KW - Piezoelectric
KW - PZT-based ceramics
UR - http://www.scopus.com/inward/record.url?scp=84950294000&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84950294000&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2015.12.012
DO - 10.1016/j.sna.2015.12.012
M3 - Article
AN - SCOPUS:84950294000
VL - 238
SP - 71
EP - 79
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
SN - 0924-4247
ER -