Multilevel programming at a low-voltage step using junction avalanche hot carrier injections

Ho Myoung An, Hee Dong Kim, Tae Geun Kim

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A highly efficient program method is proposed for multilevel programming with a low-voltage step in a conventional polycrystalline silicon-oxide-nitride- oxide-silicon structure. This method uses junction avalanche hot carriers for charge storage in the nitride layer. A multilevel storage is easily obtained by using a low-voltage step of 0.1 V at each level of the three programmed states along with a fast program time of 1 μs. In addition, a localized charge-injection near the junction edge is clearly observed with an acceptable read margin and threshold voltage difference between the forward and the reverse read at the three programmed states.

Original languageEnglish
Article number153503
JournalApplied Physics Letters
Issue number15
Publication statusPublished - 2011 Apr 11


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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