"multipoint Force Feedback" Leveling of Massively Parallel Tip Arrays in Scanning Probe Lithography

Hanaul Noh, Goo Eun Jung, Sukhyun Kim, Seong Hun Yun, Ahjin Jo, Se Jong Kahng, Nam Joon Cho, Sang Joon Cho

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

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