Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure

Woo Sung Cho, Seung Il Moon, Yang Doo Lee, Yun Hi Lee, Jung Ho Park, Byeong Kwon Ju

Research output: Contribution to journalArticle

50 Citations (Scopus)

Abstract

We address a multiwall carbon nanotube (MWCNT) gas sensor that has an enhanced reproducibility. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and an MWCNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature changes to modify the rates for desorption of gases on the sensing surface during sensor operation. Gas sensor responses of MWCNT-film to NO2 at room temperature are reported. We show that the sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of 130 °C.

Original languageEnglish
Pages (from-to)498-500
Number of pages3
JournalIEEE Electron Device Letters
Volume26
Issue number7
DOIs
Publication statusPublished - 2005 Jul

Keywords

  • Gas sensor
  • Multiwall carbon nanotube (MWCNT)
  • Nitrogen dioxide (NO)
  • Recovery

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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