Nano-imprint Lithography of 100nm sized patterns using water soluble PVA, poly(vinyl alcohol), template

Heon Lee, K. Y. Yang, S. Hong, C. D. Schaper, G. Y. Jung

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Flexible polyvinyl alcohol (PVA) templates with nano-sized patterns were fabricated by spin coating of PVA resin on silicon master wafer. Since PVA template has enough UV transparency, mechanical strength and thermal durability, it can be used as the template for UV-based and thermal nanoimprint lithography. The replicated patterns on the PVA template were transferred faithfully to the imprinted resin by imprinting lithography. As PVA template was dissolved in water, it was not necessary to deposit a releasing layer on the PVA template surface.

Original languageEnglish
Title of host publicationDiffusion and Defect Data Pt.B: Solid State Phenomena
Pages661-664
Number of pages4
Volume121-123
EditionPART 1
Publication statusPublished - 2007 Dec 1
EventChina International Conference on Nanoscience and Technology, ChinaNANO 2005 - Beijing, China
Duration: 2005 Jun 92005 Jun 11

Publication series

NameDiffusion and Defect Data Pt.B: Solid State Phenomena
NumberPART 1
Volume121-123
ISSN (Print)10120394

Other

OtherChina International Conference on Nanoscience and Technology, ChinaNANO 2005
CountryChina
CityBeijing
Period05/6/905/6/11

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Keywords

  • Mirror image pattern
  • Nano-imprint lithography
  • Nano-pattern duplication
  • Poly(vinyl alcohol)
  • Thermally curable monomer
  • Water soluble stamp

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Lee, H., Yang, K. Y., Hong, S., Schaper, C. D., & Jung, G. Y. (2007). Nano-imprint Lithography of 100nm sized patterns using water soluble PVA, poly(vinyl alcohol), template. In Diffusion and Defect Data Pt.B: Solid State Phenomena (PART 1 ed., Vol. 121-123, pp. 661-664). (Diffusion and Defect Data Pt.B: Solid State Phenomena; Vol. 121-123, No. PART 1).