Nano-patterned dual-layer ITO electrode of high brightness blue light emitting diodes using maskless wet etching

Semi Oh, Pei Chen Su, Yong Jin Yoon, Soohaeng Cho, Joon Ho Oh, Tae Yeon Seong, Kyoung Kook Kim

Research output: Contribution to journalArticle

11 Citations (Scopus)


We propose a dual-layer transparent Indium Tin Oxide (ITO) top electrode scheme and demonstrate the enhancement of the optical output power of GaN-based light emitting diodes (LEDs). The proposed dual-layer structure is composed of a layer with randomly distributed sphere-like nano-patterns obtained solely by a maskless wet etching process and a preannealed bottom layer to maintain current spreading of the electrode. It was observed that the surface morphologies and optoelectronic properties are dependent on etching duration. This electrode significantly improves the optical output power of GaN-based LEDs with an enhancement factor of 2.18 at 100 mA without degradation in electrical property when compared to a reference LED.

Original languageEnglish
JournalOptics Express
Issue number22
Publication statusPublished - 2013 Nov 4


ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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