Nanocrystalline GaZnO films for transparent electrode to silicon carbide

Jungho Lee, Ji Hong Kim, Kang Min Do, Byung-Moo Moon, Ji Hoon Lee, Sang Mo Koo

Research output: Contribution to journalArticle

Abstract

Nanocrystalline 2% Ga doped zinc oxide (GaZnO) thin films were epitaxially deposited on n-type 4H-SiC (0001) by a pulsed laser deposition (PLD) at different substrate temperatures of 250, 400, and 550 °C, respectively. Structural and electrical properties of nanocrystalline GaZnO thin film on 4H-SiC were investigated by using X-ray diffraction, atomic force microscopy (AFM), Hall effect measurement, transmission line method (TLM), and Auger electron spectroscopy (AES). The nanocrystalline GaZnO film deposited at 400 °C show the lowest resistivity of 3.3×10 -4 Ωcm, and highly c-axis oriented crystalline quality with being sharper and higher diffraction angle, which result in. The specific contact resistance (ρ c), measured from the Au/Ti/GaZnO/SiC of ∼0.05 Ω cm 2. The relative amount of activated Ga 3+ ions was 2.02% in GaZnO film by AES measurement.

Original languageEnglish
Pages (from-to)260-264
Number of pages5
JournalJournal of Nanoelectronics and Optoelectronics
Volume7
Issue number3
DOIs
Publication statusPublished - 2012 Jul 16

Fingerprint

Zinc Oxide
Zinc oxide
Silicon carbide
Oxide films
Electrodes
Auger electron spectroscopy
Thin films
Hall effect
Contact resistance
Pulsed laser deposition
Structural properties
Electric lines
Atomic force microscopy
Electric properties
Diffraction
silicon carbide
Ions
Crystalline materials
X ray diffraction
Substrates

Keywords

  • AES
  • GaZnO
  • PLD
  • SiC
  • XRD

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Nanocrystalline GaZnO films for transparent electrode to silicon carbide. / Lee, Jungho; Kim, Ji Hong; Do, Kang Min; Moon, Byung-Moo; Lee, Ji Hoon; Koo, Sang Mo.

In: Journal of Nanoelectronics and Optoelectronics, Vol. 7, No. 3, 16.07.2012, p. 260-264.

Research output: Contribution to journalArticle

Lee, Jungho ; Kim, Ji Hong ; Do, Kang Min ; Moon, Byung-Moo ; Lee, Ji Hoon ; Koo, Sang Mo. / Nanocrystalline GaZnO films for transparent electrode to silicon carbide. In: Journal of Nanoelectronics and Optoelectronics. 2012 ; Vol. 7, No. 3. pp. 260-264.
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