Nanomaterial-embedded gas sensor fabrication

Joondong Kim; Ju Hyung Yun; Chang Soo Han

doi:10.1016/j.cap.2008.12.028

Nanomaterial-embedded gas sensor fabrication

Joondong Kim, Ju Hyung Yun, Chang Soo Han

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

Nanomaterial-embedded gas sensors were fabricated on a 4-in. Si wafer counting 200 units. Carbon nanotubes (CNTs) and tin oxide (SnO) nanoparticles were prepared as hosts to detect NO₂ gas molecules at room temperature. Ink-jet approach was applied to deposit nanomaterials on a Si wafer. Metal deposition above the nanomaterials formed the metal-sitting structure providing spontaneous passivation. The performance of the CNT sensor and SnO sensor showed distinctive responses to NO₂ gas depending on the type of semiconductor. The sensor is highly sensitive, to detect a 10 ppb level of NO₂. It offers massive production of nanomaterial gas sensor units, and the performance is discussed.

Original language	English
Pages (from-to)	e38-e41
Journal	Current Applied Physics
Volume	9
Issue number	2 SUPPL.
DOIs	https://doi.org/10.1016/j.cap.2008.12.028
Publication status	Published - 2009 Mar
Externally published	Yes

Keywords

Gas sensors
Highly sensitive
Massive production
Nanomaterial

ASJC Scopus subject areas

Materials Science(all)
Physics and Astronomy(all)

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10.1016/j.cap.2008.12.028

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@article{11e40e8c49ed43508e8b0bb8604cac65,

title = "Nanomaterial-embedded gas sensor fabrication",

abstract = "Nanomaterial-embedded gas sensors were fabricated on a 4-in. Si wafer counting 200 units. Carbon nanotubes (CNTs) and tin oxide (SnO) nanoparticles were prepared as hosts to detect NO2 gas molecules at room temperature. Ink-jet approach was applied to deposit nanomaterials on a Si wafer. Metal deposition above the nanomaterials formed the metal-sitting structure providing spontaneous passivation. The performance of the CNT sensor and SnO sensor showed distinctive responses to NO2 gas depending on the type of semiconductor. The sensor is highly sensitive, to detect a 10 ppb level of NO2. It offers massive production of nanomaterial gas sensor units, and the performance is discussed.",

keywords = "Gas sensors, Highly sensitive, Massive production, Nanomaterial",

author = "Joondong Kim and Yun, {Ju Hyung} and Han, {Chang Soo}",

note = "Funding Information: The authors acknowledge financial support from Daedeok Innopolis and Center for Nanoscale Mechatronics and Manufacturing through the 21C Frontier Research Program funded by the Ministry of Education, Science and Technology (MEST) in Korea.",

year = "2009",

month = mar,

doi = "10.1016/j.cap.2008.12.028",

language = "English",

volume = "9",

pages = "e38--e41",

journal = "Current Applied Physics",

issn = "1567-1739",

publisher = "Elsevier",

number = "2 SUPPL.",

}

TY - JOUR

T1 - Nanomaterial-embedded gas sensor fabrication

AU - Kim, Joondong

AU - Yun, Ju Hyung

AU - Han, Chang Soo

N1 - Funding Information: The authors acknowledge financial support from Daedeok Innopolis and Center for Nanoscale Mechatronics and Manufacturing through the 21C Frontier Research Program funded by the Ministry of Education, Science and Technology (MEST) in Korea.

PY - 2009/3

Y1 - 2009/3

N2 - Nanomaterial-embedded gas sensors were fabricated on a 4-in. Si wafer counting 200 units. Carbon nanotubes (CNTs) and tin oxide (SnO) nanoparticles were prepared as hosts to detect NO2 gas molecules at room temperature. Ink-jet approach was applied to deposit nanomaterials on a Si wafer. Metal deposition above the nanomaterials formed the metal-sitting structure providing spontaneous passivation. The performance of the CNT sensor and SnO sensor showed distinctive responses to NO2 gas depending on the type of semiconductor. The sensor is highly sensitive, to detect a 10 ppb level of NO2. It offers massive production of nanomaterial gas sensor units, and the performance is discussed.

AB - Nanomaterial-embedded gas sensors were fabricated on a 4-in. Si wafer counting 200 units. Carbon nanotubes (CNTs) and tin oxide (SnO) nanoparticles were prepared as hosts to detect NO2 gas molecules at room temperature. Ink-jet approach was applied to deposit nanomaterials on a Si wafer. Metal deposition above the nanomaterials formed the metal-sitting structure providing spontaneous passivation. The performance of the CNT sensor and SnO sensor showed distinctive responses to NO2 gas depending on the type of semiconductor. The sensor is highly sensitive, to detect a 10 ppb level of NO2. It offers massive production of nanomaterial gas sensor units, and the performance is discussed.

KW - Gas sensors

KW - Highly sensitive

KW - Massive production

KW - Nanomaterial

UR - http://www.scopus.com/inward/record.url?scp=67349158761&partnerID=8YFLogxK

U2 - 10.1016/j.cap.2008.12.028

DO - 10.1016/j.cap.2008.12.028

M3 - Article

AN - SCOPUS:67349158761

SN - 1567-1739

VL - 9

SP - e38-e41

JO - Current Applied Physics

JF - Current Applied Physics

IS - 2 SUPPL.

ER -

Nanomaterial-embedded gas sensor fabrication

Abstract

Keywords

ASJC Scopus subject areas

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