Nanomaterial-embedded gas sensor fabrication

Joondong Kim, Ju Hyung Yun, Chang-Soo Han

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Nanomaterial-embedded gas sensors were fabricated on a 4-in. Si wafer counting 200 units. Carbon nanotubes (CNTs) and tin oxide (SnO) nanoparticles were prepared as hosts to detect NO2 gas molecules at room temperature. Ink-jet approach was applied to deposit nanomaterials on a Si wafer. Metal deposition above the nanomaterials formed the metal-sitting structure providing spontaneous passivation. The performance of the CNT sensor and SnO sensor showed distinctive responses to NO2 gas depending on the type of semiconductor. The sensor is highly sensitive, to detect a 10 ppb level of NO2. It offers massive production of nanomaterial gas sensor units, and the performance is discussed.

Original languageEnglish
JournalCurrent Applied Physics
Volume9
Issue number2 SUPPL.
DOIs
Publication statusPublished - 2009 Mar 1
Externally publishedYes

Fingerprint

Chemical sensors
Nanostructured materials
Fabrication
Carbon Nanotubes
fabrication
sensors
gases
Carbon nanotubes
Sensors
Gases
Metals
carbon nanotubes
wafers
Tin oxides
Ink
Passivation
inks
Deposits
metals
tin oxides

Keywords

  • Gas sensors
  • Highly sensitive
  • Massive production
  • Nanomaterial

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

Nanomaterial-embedded gas sensor fabrication. / Kim, Joondong; Yun, Ju Hyung; Han, Chang-Soo.

In: Current Applied Physics, Vol. 9, No. 2 SUPPL., 01.03.2009.

Research output: Contribution to journalArticle

Kim, Joondong ; Yun, Ju Hyung ; Han, Chang-Soo. / Nanomaterial-embedded gas sensor fabrication. In: Current Applied Physics. 2009 ; Vol. 9, No. 2 SUPPL.
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