Nanomaterial-embedded gas sensor fabrication

Joondong Kim, Ju Hyung Yun, Chang Soo Han

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Nanomaterial-embedded gas sensors were fabricated on a 4-in. Si wafer counting 200 units. Carbon nanotubes (CNTs) and tin oxide (SnO) nanoparticles were prepared as hosts to detect NO2 gas molecules at room temperature. Ink-jet approach was applied to deposit nanomaterials on a Si wafer. Metal deposition above the nanomaterials formed the metal-sitting structure providing spontaneous passivation. The performance of the CNT sensor and SnO sensor showed distinctive responses to NO2 gas depending on the type of semiconductor. The sensor is highly sensitive, to detect a 10 ppb level of NO2. It offers massive production of nanomaterial gas sensor units, and the performance is discussed.

Original languageEnglish
Pages (from-to)e38-e41
JournalCurrent Applied Physics
Volume9
Issue number2 SUPPL.
DOIs
Publication statusPublished - 2009 Mar

Keywords

  • Gas sensors
  • Highly sensitive
  • Massive production
  • Nanomaterial

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

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