Nanometer-scale lithography on H-passivated Si(100) by atomic force microscope in air

Hai Tal Lee, Jae Seuk Oh, Seong Ju Park, Kang Ho Park, Jeong Sook Ha, Hyung Joun Yoo, Ja Yong Koo

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

We report on the mechanical friction method for a fabrication of a Si nanostructure on a H-passivated Si(100) substrate using an atomic force microscope (AFM) in a contact mode in air. The bare Si surface region exposed by the mechanical friction between a silicon nitride tip and Si surface was fully oxidized by ambient oxygens. The oxide mask patterns could withstand a selective wet etching process for pattern transfer. The width of the oxide layer formed by an AFM tip was about 200 A. As the etching time and scan rate were decreased, the oxide line shape was improved. This study also showed that there exists a critical tip force in the removal of a H-passivating layer.

Original languageEnglish
Pages (from-to)1451-1454
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume15
Issue number3
DOIs
Publication statusPublished - 1997 Dec 1
Externally publishedYes

Fingerprint

Oxides
Lithography
Microscopes
lithography
microscopes
oxides
air
friction
Air
etching
Friction
Wet etching
Silicon nitride
silicon nitrides
Contacts (fluid mechanics)
line shape
Masks
Etching
Nanostructures
masks

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Physics and Astronomy (miscellaneous)

Cite this

Nanometer-scale lithography on H-passivated Si(100) by atomic force microscope in air. / Lee, Hai Tal; Oh, Jae Seuk; Park, Seong Ju; Park, Kang Ho; Ha, Jeong Sook; Yoo, Hyung Joun; Koo, Ja Yong.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 15, No. 3, 01.12.1997, p. 1451-1454.

Research output: Contribution to journalArticle

Lee, Hai Tal ; Oh, Jae Seuk ; Park, Seong Ju ; Park, Kang Ho ; Ha, Jeong Sook ; Yoo, Hyung Joun ; Koo, Ja Yong. / Nanometer-scale lithography on H-passivated Si(100) by atomic force microscope in air. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 1997 ; Vol. 15, No. 3. pp. 1451-1454.
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