Nanopatterning by laser interference lithography: Applications to optical devices

Jung Hun Seo, Jung ho Park, Seong Il Kim, Bang Ju Park, Zhenqiang Ma, Jinnil Choi, Byeong Kwon Ju

Research output: Contribution to journalArticle

54 Citations (Scopus)

Abstract

A systematic review, covering fabrication of nanoscale patterns by laser interference lithography (LIL) and their applications for optical devices is provided. LIL is a patterning method. It is a simple, quick process over a large area without using a mask. LIL is a powerful technique for the definition of large-area, nanometer-scale, periodically patterned structures. Patterns are recorded in a light-sensitive medium that responds nonlinearly to the intensity distribution associated with the interference of two or more coherent beams of light. The photoresist patterns produced with LIL are the platform for further fabrication of nanostructures and growth of functional materials used as the building blocks for devices. Demonstration of optical and photonic devices by LIL is reviewed such as directed nanophotonics and surface plasmon resonance (SPR) or large area membrane reflectors and anti-reflectors. Perspective on future directions for LIL and emerging applications in other fields are presented.

Original languageEnglish
Pages (from-to)1521-1532
Number of pages12
JournalJournal of Nanoscience and Nanotechnology
Volume14
Issue number2
DOIs
Publication statusPublished - 2014 Feb 1

Fingerprint

Optical Devices
Optical devices
Lithography
Lasers
lithography
interference
lasers
reflectors
Optics and Photonics
Wave interference
Light
Nanophotonics
Fabrication
Photonic devices
Functional materials
Surface Plasmon Resonance
Nanostructures
Surface plasmon resonance
Photoresists
fabrication

Keywords

  • Anti-Reflectors
  • Color Filters
  • Laser Interference Lithography
  • Optical Devices
  • Reflectors

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Chemistry(all)
  • Materials Science(all)
  • Bioengineering
  • Biomedical Engineering

Cite this

Nanopatterning by laser interference lithography : Applications to optical devices. / Seo, Jung Hun; Park, Jung ho; Kim, Seong Il; Park, Bang Ju; Ma, Zhenqiang; Choi, Jinnil; Ju, Byeong Kwon.

In: Journal of Nanoscience and Nanotechnology, Vol. 14, No. 2, 01.02.2014, p. 1521-1532.

Research output: Contribution to journalArticle

Seo, Jung Hun ; Park, Jung ho ; Kim, Seong Il ; Park, Bang Ju ; Ma, Zhenqiang ; Choi, Jinnil ; Ju, Byeong Kwon. / Nanopatterning by laser interference lithography : Applications to optical devices. In: Journal of Nanoscience and Nanotechnology. 2014 ; Vol. 14, No. 2. pp. 1521-1532.
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