Near-field sub-diffraction photolithography with an elastomeric photomask

Sangyoon Paik, Gwangmook Kim, Sehwan Chang, Sooun Lee, Dana Jin, Kwang Yong Jeong, I. Sak Lee, Jekwan Lee, Hongjae Moon, Jaejun Lee, Kiseok Chang, Su Seok Choi, Jeongmin Moon, Soonshin Jung, Shinill Kang, Wooyoung Lee, Heon Jin Choi, Hyunyong Choi, Hyun Jae Kim, Jae Hyun LeeJinwoo Cheon, Miso Kim, Jaemin Myoung, Hong Gyu Park, Wooyoung Shim

Research output: Contribution to journalArticle

Abstract

Photolithography is the prevalent microfabrication technology. It needs to meet resolution and yield demands at a cost that makes it economically viable. However, conventional far-field photolithography has reached the diffraction limit, which imposes complex optics and short-wavelength beam source to achieve high resolution at the expense of cost efficiency. Here, we present a cost-effective near-field optical printing approach that uses metal patterns embedded in a flexible elastomer photomask with mechanical robustness. This technique generates sub-diffraction patterns that are smaller than 1/10th of the wavelength of the incoming light. It can be integrated into existing hardware and standard mercury lamp, and used for a variety of surfaces, such as curved, rough and defect surfaces. This method offers a higher resolution than common light-based printing systems, while enabling parallel-writing. We anticipate that it will be widely used in academic and industrial productions.

Original languageEnglish
Article number805
JournalNature communications
Volume11
Issue number1
DOIs
Publication statusPublished - 2020 Dec 1

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ASJC Scopus subject areas

  • Chemistry(all)
  • Biochemistry, Genetics and Molecular Biology(all)
  • Physics and Astronomy(all)

Cite this

Paik, S., Kim, G., Chang, S., Lee, S., Jin, D., Jeong, K. Y., Lee, I. S., Lee, J., Moon, H., Lee, J., Chang, K., Choi, S. S., Moon, J., Jung, S., Kang, S., Lee, W., Choi, H. J., Choi, H., Kim, H. J., ... Shim, W. (2020). Near-field sub-diffraction photolithography with an elastomeric photomask. Nature communications, 11(1), [805]. https://doi.org/10.1038/s41467-020-14439-1