Negative-tone block copolymer lithography by in situ surface chemical modification

Bong Hoon Kim, Kyeong Jae Byeon, Ju Young Kim, Jinseung Kim, Hyeong Min Jin, Joong Yeon Cho, Seong Jun Jeong, Jonghwa Shin, Heon Lee, Sang Ouk Kim

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3 Citations (Scopus)

Abstract

Negative-tone block copolymer (BCP) lithography based on in situ surface chemical modifi cation is introduced as a highly efficient, versatile self-assembled nanopatterning. BCP blends films consisting of end-functionalized low molecular weight poly(styrene- ran -methyl methacrylate) and polystyrene- block -Poly(methyl methacylate) can produce surface vertical BCP nanodomains on various substrates without prior surface chemical treatment. Simple oxygen plasma treatment is employed to activate surface functional group formation at various substrates, where the end-functionalized polymers can be covalently bonded during the thermal annealing of BCP thin films. The covalently bonded brush layer mediates neutral interfacial condition for vertical BCP nanodomain alignment. This straightforward approach for high aspect ratio, vertical self-assembled nanodomain formation facilitates single step, site-specific BCP nanopatterning widely useful for various substrates. Moreover, this approach is compatible with directed self-assembly approaches to produce device oriented laterally ordered nanopatterns.

Original languageEnglish
Pages (from-to)4207-4212
Number of pages6
JournalSmall
Volume10
Issue number20
DOIs
Publication statusPublished - 2014 Oct 29

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ASJC Scopus subject areas

  • Biomaterials
  • Engineering (miscellaneous)
  • Biotechnology

Cite this

Kim, B. H., Byeon, K. J., Kim, J. Y., Kim, J., Jin, H. M., Cho, J. Y., Jeong, S. J., Shin, J., Lee, H., & Kim, S. O. (2014). Negative-tone block copolymer lithography by in situ surface chemical modification. Small, 10(20), 4207-4212. https://doi.org/10.1002/smll.201400971