Nickel-silicidation process using hydrogen implantation

C. J. Choi, S. A. Song, Y. W. Ok, T. Y. Seong

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Nickel-silicidation process using hydrogen implantation'. Together they form a unique fingerprint.

Engineering & Materials Science