Non-alloyed ohmic contacts on GaAs using metal-interlayer-semiconductor structure with SF6 plasma treatment

Seung Hwan Kim, Gwang Sik Kim, Sun Woo Kim, Jeong Kyu Kim, Changhwan Choi, Jin Hong Park, Rino Choi, Hyun Yong Yu

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds