Non-collapsible PDMS nanochannel fabrication with tunable width and height using single master mold

Chang Beom Kim, Honggu Chun, Jaehun Chung, Ki Bong Song, Sang Hoon Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A tunable polydimethylsiloxane (PDMS) nanoslit fabrication process was developed for biological sample manipulation. A microcontact printing (CP) of laterally spreading self-assembled hexadecanethiol (HDT) layer, combined with in-situ curing of a sliding SU-8 droplet, enabled precise and independent tuning of a nanoslit-mold width and height using single CP master mold. The SU-8 nanoslit-mold was replicated using a hard-soft composite PDMS to prevent channel collapse at low (< 0.2) aspect ratio (height over width). The fluidic characteristics as well as dimensions of nanoslits fabricated with various conditions are analyzed using fluorescein sample and AFM images. Finally, concentration polarization-based sample preconcentration is successfully demonstrated at the nanoslit boundary where an electric double layer is overlapped.

Original languageEnglish
Title of host publicationProceedings of the IEEE Conference on Nanotechnology
Pages1723-1727
Number of pages5
DOIs
Publication statusPublished - 2011 Dec 1
Event2011 11th IEEE International Conference on Nanotechnology, NANO 2011 - Portland, OR, United States
Duration: 2011 Aug 152011 Aug 19

Other

Other2011 11th IEEE International Conference on Nanotechnology, NANO 2011
CountryUnited States
CityPortland, OR
Period11/8/1511/8/19

Keywords

  • Composite PDMS
  • Ion preconcentration
  • Microcontact printing
  • Nanoslit
  • Sliding mold method

ASJC Scopus subject areas

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics

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  • Cite this

    Kim, C. B., Chun, H., Chung, J., Song, K. B., & Lee, S. H. (2011). Non-collapsible PDMS nanochannel fabrication with tunable width and height using single master mold. In Proceedings of the IEEE Conference on Nanotechnology (pp. 1723-1727). [6144473] https://doi.org/10.1109/NANO.2011.6144473