Novel chemistry for surface engineering in MEMS

X. Y. Zhu, Yongseok Jun, V. Boiadjiev, R. Major, H. I. Kim, J. E. Houston

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

It is well recognized that controlling surface forces is one of the key issues in the design, fabrication, and operation of microelectromechanical systems (MEMS). In this report we present a novel strategy for the efficient assembly of organic monolayers onto silicon surfaces to control surface energy. This is achieved by the reaction between an alcohol functional group and a chlorinated Si surface. The resulting molecular monolayers are thermally and chemically stable. Surface adhesion energy on silicon is reduced by a factor of 40 by the monolayer coating and friction coefficient of the coated surface is only 0.013. The coatings are successfully demonstrated in adhesion reduction in a model MEMS structure: cantilever beam array (CBA). Polycrystalline beams with length up to 1.5 mm can be released.

Original languageEnglish
Pages (from-to)EE331-EE336
JournalMaterials Research Society Symposium - Proceedings
Volume657
Publication statusPublished - 2001 Jan 1
Externally publishedYes

Fingerprint

microelectromechanical systems
MEMS
engineering
chemistry
Monolayers
Silicon
adhesion
Adhesion
coatings
Coatings
control surfaces
Control surfaces
cantilever beams
Cantilever beams
silicon
Interfacial energy
coefficient of friction
Functional groups
surface energy
alcohols

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Zhu, X. Y., Jun, Y., Boiadjiev, V., Major, R., Kim, H. I., & Houston, J. E. (2001). Novel chemistry for surface engineering in MEMS. Materials Research Society Symposium - Proceedings, 657, EE331-EE336.

Novel chemistry for surface engineering in MEMS. / Zhu, X. Y.; Jun, Yongseok; Boiadjiev, V.; Major, R.; Kim, H. I.; Houston, J. E.

In: Materials Research Society Symposium - Proceedings, Vol. 657, 01.01.2001, p. EE331-EE336.

Research output: Contribution to journalArticle

Zhu, XY, Jun, Y, Boiadjiev, V, Major, R, Kim, HI & Houston, JE 2001, 'Novel chemistry for surface engineering in MEMS', Materials Research Society Symposium - Proceedings, vol. 657, pp. EE331-EE336.
Zhu XY, Jun Y, Boiadjiev V, Major R, Kim HI, Houston JE. Novel chemistry for surface engineering in MEMS. Materials Research Society Symposium - Proceedings. 2001 Jan 1;657:EE331-EE336.
Zhu, X. Y. ; Jun, Yongseok ; Boiadjiev, V. ; Major, R. ; Kim, H. I. ; Houston, J. E. / Novel chemistry for surface engineering in MEMS. In: Materials Research Society Symposium - Proceedings. 2001 ; Vol. 657. pp. EE331-EE336.
@article{514515d91e5346bfb4dd25d56250e3c2,
title = "Novel chemistry for surface engineering in MEMS",
abstract = "It is well recognized that controlling surface forces is one of the key issues in the design, fabrication, and operation of microelectromechanical systems (MEMS). In this report we present a novel strategy for the efficient assembly of organic monolayers onto silicon surfaces to control surface energy. This is achieved by the reaction between an alcohol functional group and a chlorinated Si surface. The resulting molecular monolayers are thermally and chemically stable. Surface adhesion energy on silicon is reduced by a factor of 40 by the monolayer coating and friction coefficient of the coated surface is only 0.013. The coatings are successfully demonstrated in adhesion reduction in a model MEMS structure: cantilever beam array (CBA). Polycrystalline beams with length up to 1.5 mm can be released.",
author = "Zhu, {X. Y.} and Yongseok Jun and V. Boiadjiev and R. Major and Kim, {H. I.} and Houston, {J. E.}",
year = "2001",
month = "1",
day = "1",
language = "English",
volume = "657",
pages = "EE331--EE336",
journal = "Materials Research Society Symposium Proceedings",
issn = "0272-9172",
publisher = "Materials Research Society",

}

TY - JOUR

T1 - Novel chemistry for surface engineering in MEMS

AU - Zhu, X. Y.

AU - Jun, Yongseok

AU - Boiadjiev, V.

AU - Major, R.

AU - Kim, H. I.

AU - Houston, J. E.

PY - 2001/1/1

Y1 - 2001/1/1

N2 - It is well recognized that controlling surface forces is one of the key issues in the design, fabrication, and operation of microelectromechanical systems (MEMS). In this report we present a novel strategy for the efficient assembly of organic monolayers onto silicon surfaces to control surface energy. This is achieved by the reaction between an alcohol functional group and a chlorinated Si surface. The resulting molecular monolayers are thermally and chemically stable. Surface adhesion energy on silicon is reduced by a factor of 40 by the monolayer coating and friction coefficient of the coated surface is only 0.013. The coatings are successfully demonstrated in adhesion reduction in a model MEMS structure: cantilever beam array (CBA). Polycrystalline beams with length up to 1.5 mm can be released.

AB - It is well recognized that controlling surface forces is one of the key issues in the design, fabrication, and operation of microelectromechanical systems (MEMS). In this report we present a novel strategy for the efficient assembly of organic monolayers onto silicon surfaces to control surface energy. This is achieved by the reaction between an alcohol functional group and a chlorinated Si surface. The resulting molecular monolayers are thermally and chemically stable. Surface adhesion energy on silicon is reduced by a factor of 40 by the monolayer coating and friction coefficient of the coated surface is only 0.013. The coatings are successfully demonstrated in adhesion reduction in a model MEMS structure: cantilever beam array (CBA). Polycrystalline beams with length up to 1.5 mm can be released.

UR - http://www.scopus.com/inward/record.url?scp=0035556789&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035556789&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0035556789

VL - 657

SP - EE331-EE336

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

SN - 0272-9172

ER -