This paper presents the 2ω method, a newly developed ac mode local thermal property imaging technique with nanoscale spatial resolution. The authors batch-fabricate the thermoelectric probe, whose junction size is about 200 nm, with yield higher than 95%. The shortest time constant of the thermoelectric probe is measured to be 0.72 ms. They experimentally demonstrate that the 2ω method can map out the local thermal property of a sample by monitoring the amplitude of the 2ω signal from the thermocouple junction of a probe heated by an ac. By comparing with the thermal property images obtained by other methods, they also show that the 2ω method using the point-heating and point-sensing scheme is the most suitable for the nanoscale thermal property imaging.
|Number of pages||7|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 2006 Oct 9|
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Surfaces and Interfaces
- Physics and Astronomy (miscellaneous)