Novel nanoscale thermal property imaging technique: The 2ω method. II. Demonstration and comparison

Hee Hwan Roh, Joon Sik Lee, Dong Lib Kim, Jisang Park, Kyeongtae Kim, Oh Myoung Kwon, Seung Ho Park, Young Ki Choi, Arun Majumdar

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

This paper presents the 2ω method, a newly developed ac mode local thermal property imaging technique with nanoscale spatial resolution. The authors batch-fabricate the thermoelectric probe, whose junction size is about 200 nm, with yield higher than 95%. The shortest time constant of the thermoelectric probe is measured to be 0.72 ms. They experimentally demonstrate that the 2ω method can map out the local thermal property of a sample by monitoring the amplitude of the 2ω signal from the thermocouple junction of a probe heated by an ac. By comparing with the thermal property images obtained by other methods, they also show that the 2ω method using the point-heating and point-sensing scheme is the most suitable for the nanoscale thermal property imaging.

Original languageEnglish
Pages (from-to)2405-2411
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume24
Issue number5
DOIs
Publication statusPublished - 2006 Oct 9

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

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