Abstract
In this and the following companion articles, the authors present the 2ω method, a novel ac mode local thermal property imaging technique with nanoscale spatial resolution. To demonstrate the use of the thermoelectric probe as an active one that can function as both a heater and a temperature sensor, the authors develop and implement the 2ω signal measurement technique, which can extract thermoelectric signals from a thermocouple junction while electrically heating it simultaneously. The principle of the 2ω signal measurement technique is explained by a steady periodic electrothermal analysis. The authors use a specially designed test pattern to experimentally verify that the 2ω signal is caused by the temperature oscillation induced by Joule heating. In addition, based on the results from an experiment using a cross-shaped pattern, the measurement accuracy of the 2ω method depends on the junction size of the thermoelectric probe. The 2ω method is implemented and compared with other methods in the following companion paper.
| Original language | English |
|---|---|
| Pages (from-to) | 2398-2404 |
| Number of pages | 7 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 24 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2006 Oct 9 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Surfaces and Interfaces
- Physics and Astronomy (miscellaneous)
Cite this
Novel nanoscale thermal property imaging technique : The 2ω method. I. Principle and the 2ω signal measurement. / Roh, Hee Hwan; Lee, Joon Sik; Kim, Dong Lib; Park, Jisang; Kim, Kyeongtae; Kwon, Oh Myoung; Park, Seung Ho; Choi, Young Ki; Majumdar, Arun.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 24, No. 5, 09.10.2006, p. 2398-2404.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Novel nanoscale thermal property imaging technique
T2 - The 2ω method. I. Principle and the 2ω signal measurement
AU - Roh, Hee Hwan
AU - Lee, Joon Sik
AU - Kim, Dong Lib
AU - Park, Jisang
AU - Kim, Kyeongtae
AU - Kwon, Oh Myoung
AU - Park, Seung Ho
AU - Choi, Young Ki
AU - Majumdar, Arun
PY - 2006/10/9
Y1 - 2006/10/9
N2 - In this and the following companion articles, the authors present the 2ω method, a novel ac mode local thermal property imaging technique with nanoscale spatial resolution. To demonstrate the use of the thermoelectric probe as an active one that can function as both a heater and a temperature sensor, the authors develop and implement the 2ω signal measurement technique, which can extract thermoelectric signals from a thermocouple junction while electrically heating it simultaneously. The principle of the 2ω signal measurement technique is explained by a steady periodic electrothermal analysis. The authors use a specially designed test pattern to experimentally verify that the 2ω signal is caused by the temperature oscillation induced by Joule heating. In addition, based on the results from an experiment using a cross-shaped pattern, the measurement accuracy of the 2ω method depends on the junction size of the thermoelectric probe. The 2ω method is implemented and compared with other methods in the following companion paper.
AB - In this and the following companion articles, the authors present the 2ω method, a novel ac mode local thermal property imaging technique with nanoscale spatial resolution. To demonstrate the use of the thermoelectric probe as an active one that can function as both a heater and a temperature sensor, the authors develop and implement the 2ω signal measurement technique, which can extract thermoelectric signals from a thermocouple junction while electrically heating it simultaneously. The principle of the 2ω signal measurement technique is explained by a steady periodic electrothermal analysis. The authors use a specially designed test pattern to experimentally verify that the 2ω signal is caused by the temperature oscillation induced by Joule heating. In addition, based on the results from an experiment using a cross-shaped pattern, the measurement accuracy of the 2ω method depends on the junction size of the thermoelectric probe. The 2ω method is implemented and compared with other methods in the following companion paper.
UR - http://www.scopus.com/inward/record.url?scp=33749371056&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33749371056&partnerID=8YFLogxK
U2 - 10.1116/1.2353842
DO - 10.1116/1.2353842
M3 - Article
AN - SCOPUS:33749371056
VL - 24
SP - 2398
EP - 2404
JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
SN - 1071-1023
IS - 5
ER -