Novel nanoscale thermal property imaging technique: The 2ω method. I. Principle and the 2ω signal measurement

Hee Hwan Roh, Joon Sik Lee, Dong Lib Kim, Jisang Park, Kyeongtae Kim, Oh Myoung Kwon, Seung Ho Park, Young Ki Choi, Arun Majumdar

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

In this and the following companion articles, the authors present the 2ω method, a novel ac mode local thermal property imaging technique with nanoscale spatial resolution. To demonstrate the use of the thermoelectric probe as an active one that can function as both a heater and a temperature sensor, the authors develop and implement the 2ω signal measurement technique, which can extract thermoelectric signals from a thermocouple junction while electrically heating it simultaneously. The principle of the 2ω signal measurement technique is explained by a steady periodic electrothermal analysis. The authors use a specially designed test pattern to experimentally verify that the 2ω signal is caused by the temperature oscillation induced by Joule heating. In addition, based on the results from an experiment using a cross-shaped pattern, the measurement accuracy of the 2ω method depends on the junction size of the thermoelectric probe. The 2ω method is implemented and compared with other methods in the following companion paper.

Original languageEnglish
Pages (from-to)2398-2404
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume24
Issue number5
DOIs
Publication statusPublished - 2006 Oct 9

Fingerprint

signal measurement
imaging techniques
Thermodynamic properties
thermodynamic properties
Imaging techniques
probes
Joule heating
temperature sensors
thermocouples
heaters
spatial resolution
Temperature sensors
Thermocouples
oscillations
heating
Heating
temperature
Experiments
Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

Novel nanoscale thermal property imaging technique : The 2ω method. I. Principle and the 2ω signal measurement. / Roh, Hee Hwan; Lee, Joon Sik; Kim, Dong Lib; Park, Jisang; Kim, Kyeongtae; Kwon, Oh Myoung; Park, Seung Ho; Choi, Young Ki; Majumdar, Arun.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 24, No. 5, 09.10.2006, p. 2398-2404.

Research output: Contribution to journalArticle

Roh, Hee Hwan ; Lee, Joon Sik ; Kim, Dong Lib ; Park, Jisang ; Kim, Kyeongtae ; Kwon, Oh Myoung ; Park, Seung Ho ; Choi, Young Ki ; Majumdar, Arun. / Novel nanoscale thermal property imaging technique : The 2ω method. I. Principle and the 2ω signal measurement. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2006 ; Vol. 24, No. 5. pp. 2398-2404.
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