Novel test procedure of tensile test for MEMS materials

Jun Hyub Park, Yun-Jae Kim, Man Sik Myung, Chang Seung Lee, Sung Hoon Choa, Nam Sup Choi

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

This paper describes a novel test procedure, new structure of specimen easy to manipulate, align and grip a thin-film and test machine for a tensile and fatigue test. For the proposed specimen, the surroundings of the specimen including the side support strips except for six bridges are etched during the fabrication of the specimen, which in turn makes it possible to cut off easily the specimen from the wafer by minimizing a damage to the test film and also possible to produce the specimen in mass production. For the present specimen, a small hole is made at the grip end and using a small pin for setting the specimen onto the tester, the setting process and alignment of specimen is much easier, compared to the specimen proposed by Sharpe et al. To gain confidence in reliability of testing results, pre-test using the Al-3%Ti is performed, which is widely used in the RF switch and other MEMS devices. Tensile tests are performed, from which tensile strengths of the Al-3%Ti are measured as 343±16.22MPa at 200μm width and 1.1μm thickness.

Original languageEnglish
Pages (from-to)136-139
Number of pages4
JournalKey Engineering Materials
Volume321-323 I
Publication statusPublished - 2006 Oct 12

Fingerprint

MEMS
Tensile strength
Switches
Fatigue of materials
Fabrication
Thin films
Testing

Keywords

  • Fatigue properties
  • Mechanical property
  • MEMS material
  • Tensile test

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemical Engineering (miscellaneous)

Cite this

Park, J. H., Kim, Y-J., Myung, M. S., Lee, C. S., Choa, S. H., & Choi, N. S. (2006). Novel test procedure of tensile test for MEMS materials. Key Engineering Materials, 321-323 I, 136-139.

Novel test procedure of tensile test for MEMS materials. / Park, Jun Hyub; Kim, Yun-Jae; Myung, Man Sik; Lee, Chang Seung; Choa, Sung Hoon; Choi, Nam Sup.

In: Key Engineering Materials, Vol. 321-323 I, 12.10.2006, p. 136-139.

Research output: Contribution to journalArticle

Park, JH, Kim, Y-J, Myung, MS, Lee, CS, Choa, SH & Choi, NS 2006, 'Novel test procedure of tensile test for MEMS materials', Key Engineering Materials, vol. 321-323 I, pp. 136-139.
Park JH, Kim Y-J, Myung MS, Lee CS, Choa SH, Choi NS. Novel test procedure of tensile test for MEMS materials. Key Engineering Materials. 2006 Oct 12;321-323 I:136-139.
Park, Jun Hyub ; Kim, Yun-Jae ; Myung, Man Sik ; Lee, Chang Seung ; Choa, Sung Hoon ; Choi, Nam Sup. / Novel test procedure of tensile test for MEMS materials. In: Key Engineering Materials. 2006 ; Vol. 321-323 I. pp. 136-139.
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